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Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts in the field, this volume explores a wide range of MEMS applications, ranging from inertial sensors, microactuators, and microscale vacuum pumps to microrobtics and micro-droplet generators. The final section of the book looks toward the future of MEMS, including MEMS autonomous control of free-shear flows and fabrication technologies for nanoscale devices.…mehr

Produktbeschreibung
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts in the field, this volume explores a wide range of MEMS applications, ranging from inertial sensors, microactuators, and microscale vacuum pumps to microrobtics and micro-droplet generators. The final section of the book looks toward the future of MEMS, including MEMS autonomous control of free-shear flows and fabrication technologies for nanoscale devices. New chapters in this edition explore topics such as nonlinear electrokinetic devices and molecular self-assembly.

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