Sergey Edward Lyshevski

MEMS and NEMS (eBook, PDF)

Systems, Devices, and Structures

• Format: PDF

Produktbeschreibung

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 461
• Erscheinungstermin: 3. Oktober 2018
• Englisch
• ISBN-13: 9781420040517
• Artikelnr.: 53178245

Autorenporträt

Sergey Edward Lyshevski

Inhaltsangabe

Overview and Introduction. New Trends in Engineering and Science: Micro- and Nanoscale Systems. Fundamentals of MEMS Fabrication. Devising and Synthesis of MEMS and NEMS. Modeling of Micro- and Nanoelectromechanical Systems
Devices
and Structures. Nanosystems
Quantum Mechanics
and Mathematical Models. Control of Microelectromechanical Systems. Case Studies: Synthesis
Analysis
Fabrication
and Computer-Aided Design of MEMS. Index.