Handbook of Optical Dimensional Metrology
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Requiring no prior expertise in optical dimensional metrology, this handbook helps readers understand the capabilities and limitations of optical metrology methods. It shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems. After building a foundation for evaluating optical measurement methods, the book focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. Best practices and practical examples aid readers in effectively using the methods.

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Produktbeschreibung
Requiring no prior expertise in optical dimensional metrology, this handbook helps readers understand the capabilities and limitations of optical metrology methods. It shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems. After building a foundation for evaluating optical measurement methods, the book focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. Best practices and practical examples aid readers in effectively using the methods.
Autorenporträt
Kevin Harding is a principal scientist at GE Research in Niskayuna, New York, where he leads work in optical metrology at the R&D center and provides guidance to a wide range of optical technology projects. Internationally recognized for his work in 3D measurement technology, he has received numerous honors, including the Automated Imaging Association Leadership Award and the SME Eli Whitney Productivity Award. A SPIE fellow, Harding has published over 120 technical papers, taught more than 60 short courses and tutorials, contributed sections to six books, and received over 55 patents.