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Presenting unified coverage of the design and modeling of smartmicro- and macrosystems, this book addresses fabrication issues andoutlines the challenges faced by engineers working with smartsensors in a variety of applications. Part I deals with the fundamental concepts of a typical smartsystem and its constituent components. Preliminary fabrication andcharacterization concepts are introduced before design principlesare discussed in detail. Part III presents a comprehensive accountof the modeling of smart systems, smart sensors and actuators. PartIV builds upon the fundamental concepts to…mehr
Presenting unified coverage of the design and modeling of smartmicro- and macrosystems, this book addresses fabrication issues andoutlines the challenges faced by engineers working with smartsensors in a variety of applications. Part I deals with the fundamental concepts of a typical smartsystem and its constituent components. Preliminary fabrication andcharacterization concepts are introduced before design principlesare discussed in detail. Part III presents a comprehensive accountof the modeling of smart systems, smart sensors and actuators. PartIV builds upon the fundamental concepts to analyze fabricationtechniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessmentof applications in communications technology, aerospace, biomedicaland mechanical engineering. The book provides an essentialreference or textbook for graduates following a course in smartsensors, actuators and systems.
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Vijay K. Varadan currently holds the 21st Century EndowedChair in Nano- and Biotechnologies and Medicine and isDistinguished Professor of Electrical Engineering and DistinguishedProfessor of Biomedical Engineering (College of Engineering) andNeurosurgery (College of Medicine) at the University of Arkansas,USA. He is also the Director of the Institute for Nano-, Micro- andNeuroelectronics, Sensors and Systems and the Director of theHigh-Density Electronics Center. He has concentrated on the designand development of various electronic, acoustic and structuralcomposites, smart materials, structures and devices, includingsensors, transducers, Micro Electromechanical Systems (MEMS), plusthe synthesis and large-scale fabrication of carbon nanotubes, NanoElectromechanical Systems (NEMS), microwave, acoustic andultrasonic wave absorbers and filters. He has developedneurostimulators, wireless microsensors and systems for the sensingand control of Parkinson's disease, epilepsy, glucose in theblood and Alzhiemer's disease. He is also currentlydeveloping both silicon- and organic-based wireless sensor systemswith radio frequency identification (RFID) for human gait analysisand sleep disorders and various neurological disorders. He is aneditor of the Journal of Wave-Material Interaction and theEditorin- Chief of the Journal of Smart Materials and Structures,as well as being an Associate Editor of the Journal ofMicrolithography, Microfabrication and Microsystems. In addition,he also serves on the editorial board of the International Journalof Computational Methods. He has published more than 500 journal papers and 11 books. Heholds 12 patents pertinent to conducting polymers, smartstructures, smart antennas, phase shifters, carbon nanotubes,implantable devices for Parkinson's patients, MEMSaccelerometers and gyroscopes. K. J. Vinoy is an Assistant Professor in the Departmentof Electrical Communication Engineering at the Indian Institute ofScience, Bangalore, India. He received an M.Tech degree inElectronics from the Cochin University of Science and Technology,India and a Ph.D. degree in Engineering Science and Mechanics fromthe Pennsylvania State University, USA, in 1993 and 2002,respectively. From 1994 to 1998, he worked at the NationalAerospace Laboratories, Bangalore, India. Following this, he was aresearch assistant at the Center for the Engineering of Electronicand Acoustic Materials and Devices (CEEAMD) at the PennsylvaniaState University from 1999 to 2002. He continued there to carry outpostdoctoral research from 2002 to August 2003. His researchinterests include several aspects of microwave engineering, RF-MEMSand smart material systems. He has published over 50 papers intechnical journals and conference proceedings. His otherpublications include two books, namely Radar Absorbing Materials:From Theory to Design and Characterization, and RF-MEMS and theirApplications. He also holds one US patent. S. Gopalakrishnan received his Master's Degree inEngineering Mechanics from the Indian Institute of Technology,Madras, Chennai, India and his Ph.D. degree from the School ofAeronautics and Astronautics, Purdue University, USA. He joined theDepartment of Aerospace Engineering at the Indian Institute ofScience, Bangalore, India in November 1997 as Assistant Professorand is currently an Associate Professor in the same department. Hisareas of interest include structural dynamics, wave propagation,computational mechanics, smart structures, MEMS and nanocompositestructures. He is a Fellow of the Indian National Academy ofEngineering and a recipient of the 'Satish Dhawan YoungScientist Award' for outstanding contributions in AerospaceSciences from the Government of Karnataka, India. He serves on theeditorial board of three prime international computationalmechanics journals and has published 70 papers in internationaljournals and 45 conference papers.
Preface.About the Authors.PART 1: FUNDAMENTALS.1. Introduction to Smart Systems.2. Processing of Smart Materials.PART 2: DESIGN PRINCIPLES.3. Sensors for Smart Systems.4. Actuators for Smart Systems.5. Design Examples for Sensors and Actuators.PART 3: MODELING TECHNIQUES.6. Introductory Concepts in Modeling.7. Introduction to the Finite Element Method.8. Modeling of Smart Sensors and Actuators.9. Active Control Techniques.PART 4: FABRICATION METHODS AND APPLICATIONS.10. Silicon Fabrication Techniques for MEMS.11. Polymeric MEMS Fabrication Techniques.12. Integration and Packaging of Smart Microsystems.13. Fabrication Examples of Smart Microsystems.14. Structural Health Monitoring Applications.15. Vibration and Noise-Control Applications.Index.
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