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The study of ternary oxide materials continues to generate great interest because of their interesting properties that offer electronic and optical performance for various applications.It is really a challenge to prepare by a cost effective chemical method these new thin-film materials for great potential applications such as gas sensor technology. This book highlights the structural optical and electrical investigations made on the ternary oxides semconductors such as Zn2SnO4, ZnxNi1-xO and NiSnO3. The structural, morphological, optical and electrical properties of these thin films have been studied according to some experimental conditions. Moreover, these oxides have been tested for the first time as gas sensors especially against ethanol vapor.