Using Precise Mechanisms in Modern Vacuum Technological Equipment.- Typical Vacuum Mechanisms.- Friction in Vacuum.- Matrix Method of the Design of New Mechanisms Structure.- Precision of Vacuum Mechanisms.- Vacuum Mechanisms of Nanoscale Precision.- Ultrahigh Vacuum Rotary-Motion Feedthroughs.- Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs.- Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation.- Flow of Microparticles Originating from Mechanisms in Vacuum.
Using Precise Mechanisms in Modern Vacuum Technological Equipment.- Typical Vacuum Mechanisms.- Friction in Vacuum.- Matrix Method of the Design of New Mechanisms Structure.- Precision of Vacuum Mechanisms.- Vacuum Mechanisms of Nanoscale Precision.- Ultrahigh Vacuum Rotary-Motion Feedthroughs.- Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs.- Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation.- Flow of Microparticles Originating from Mechanisms in Vacuum.
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