Run-to-Run Control in Semiconductor Manufacturing (eBook, PDF)

Redaktion: Moyne, James; Hurwitz, Arnon M.; Del Castillo, Enrique

• Format: PDF

Produktbeschreibung

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 368
• Erscheinungstermin: 8. Oktober 2018
• Englisch
• ISBN-13: 9781420040661
• Artikelnr.: 52994370