Nonthermal Plasma Chemistry and Physics (eBook, PDF)

Redaktion: Meichsner, Jurgen; Wagner, Hans-Erich; Schneider, Ralf; Schmidt, Martin

• Format: PDF

Produktbeschreibung

Nonthermal Plasma Chemistry and Physics provides a comprehensive presentation of the basics of plasma physics as well as new developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamental elementary processes in plasma chemistry. Expert contributors address environmental aspects of plasma chemistry. The book also includes selected plasma conditions and specific applications in volume plasma chemistry and treatment of material surfaces such as plasma etching in microelectronics, chemical modification of polymer surfaces and deposition of functional thin films.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 564
• Erscheinungstermin: 13. November 2012
• Englisch
• ISBN-13: 9781420059212
• Artikelnr.: 40067725

Autorenporträt

Jurgen Meichsner, Martin Schmidt, Ralf Schneider, Hans-Erich Wagner

Inhaltsangabe

Introduction. Nonthermal Plasma Chemical Processes of General Interest.
Physics of Nonthermal Plasmas. Nonthermal Plasma Chemical Reactors.
Elementary Processes on Surfaces in Plasma-Wall Interaction. Plasma
Diagnostics. Surface and Thin Film Analysis. Selected Applications.
Modeling and Simulation. Trends and New Concepts.