eBook, PDF

Lithography (eBook, PDF)

Beschreibung

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Technische Details

• Geräte: PC
• mit Kopierschutz
• Größe: 8.48MB

Barrierefreiheit

• Text-to-Speech

Autor

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

Produktdetails

• Verlag: Wiley
• Seitenzahl: 320
• Erscheinungstermin: 4. März 2013
• Englisch
• ISBN-13: 9781118621233
• Artikelnr.: 37651183