Julius J. Muray, Ivor Brodie

The Physics of Micro/Nano-Fabrication

• Broschiertes Buch

Produktbeschreibung

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Produktdetails

• Microdevices
• Verlag: Springer / Springer US / Springer, Berlin
• Artikelnr. des Verlages: 978-1-4419-3221-1
• 1992
• Seitenzahl: 676
• Erscheinungstermin: 6. Dezember 2010
• Englisch
• Abmessung: 244mm x 170mm x 37mm
• Gewicht: 1268g
• ISBN-13: 9781441932211
• ISBN-10: 1441932216
• Artikelnr.: 32136031

Inhaltsangabe

1. Preliminary Survey.- 2. Particle Beams: Sources, Optics, and Interactions.- 3. Plasmas: Physics and Chemistry.- 4. Layering Technologies.- 5. Pattern Generation.- 6. Microcharacterization.- 7. Limits to Nanofabrication.- Appendixes.- Author Index.