Denise Reichel

Temperature Measurement during Millisecond Annealing

Ripple Pyrometry for Flash Lamp Annealers

• Broschiertes Buch

Produktbeschreibung

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Produktdetails

• MatWerk
• Verlag: Springer / Springer Fachmedien Wiesbaden / Springer, Berlin
• Artikelnr. des Verlages: 978-3-658-11387-2
• 1st ed. 2015
• Seitenzahl: 140
• Erscheinungstermin: 14. Januar 2016
• Englisch
• Abmessung: 210mm x 148mm x 8mm
• Gewicht: 192g
• ISBN-13: 9783658113872
• ISBN-10: 3658113871
• Artikelnr.: 43607113

Autorenporträt

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.

Inhaltsangabe

Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing.- Concept of ripple pyrometry during flash lamp annealing.- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.