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The emphasis on research into sensor microsystems has been driven by bottom-up concerns, but in a world where systems using millions of sensors are proposed, engineers need to adopt a top-down systems engineering perspective to address the design problems posed. Smart MEMS and Sensor Systems provides this perspective. Sensor-level design is discussed in some detail to inform this top-down treatment, including a study of some state-of-the-art fabrication and integration technologies, the use of AI and ANN techniques for sensor enhancement, control/identification techniques and a case study in advanced optical MEMS. At the system level, the discussion centers on how a generic, intelligent or "cogent" sensor forms a building block for higher-level systems, including advanced multi-function arrays and networks. A design methodology for these networks is developed. The book concludes with a discussion on the continuing development of advanced intelligent sensor systems.