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The energy conversion, storage and distribution are the important concerns of our civilization in order to meet the challenges of global warming and finite nature of the fossil fuels. In response to the needs of the modern society and emerging technological advancements, it is now essential that new, low cost and environment friendly energy conversion and storage systems are to be developed. As the general tendency of all advanced technologies is towards miniaturization, it is evident that the future development of batteries is aimed at smaller dimensions with higher-energy densities. The development of solid-state batteries parallels the development of semiconductor electronics. Systematic and detailed investigations were made on the growth and characterization of tungsten oxide thin films considering the importance of these films in the fabrication of all solid state microbattery application.