Optical Inspection of Microsystems

Herausgeber: Osten, Wolfgang

• Broschiertes Buch

Produktbeschreibung

This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

Produktdetails

• Verlag: Taylor & Francis Ltd (Sales)
• Seitenzahl: 532
• Erscheinungstermin: 17. Oktober 2019
• Englisch
• Abmessung: 251mm x 178mm x 33mm
• Gewicht: 1270g
• ISBN-13: 9780367390570
• ISBN-10: 0367390574
• Artikelnr.: 58054716

Autorenporträt

Osten, Wolfgang

Inhaltsangabe

Image Processing and Computer Vision for MEMS Testing. Image Correlation
Techniques for Microsystems Inspection. Light Scattering Techniques for the
Inspection of Microcomponents and Microstructures. Characterization and
Measurement of Microcomponents with the Atomic Force Microscope (AFM).
Optical Profiling Techniques for MEMS Measurement. Grid and Moiré Methods
for Micromeasurements. Grating Interferometry for In-Plane Displacement and
Strain Measurement of Microcomponents. Interference Microscopy Techniques
for Microsystem Characterization. Measuring MEMS in Motion by Laser Doppler
Vibrometry. An Interferometric Platform for Static, Quasi-Static, and
Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS.
Optoelectronic Holography for Testing Electronic Packaging and MEMS.
Digital Holography and Its Application in MEMS/MOEMS Inspection. Speckle
Metrology for Microsystem Inspection. Spectroscopic Techniques for MEMS
Inspection. Index.