Novel Micro-bridge Actuator For Optical Switching Application
Aron MichaelChee Yee Kwok
Broschiertes Buch

Novel Micro-bridge Actuator For Optical Switching Application

Micro-bridge actuator for optical switching application

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The development of a novel micro-bridge actuator for optical switching applications is presented in this book. It covers the design, simulation, micro-fabrication, and testing of the actuator including its integration with a vertical micro-mirror. Detail studies on the buckled shape multi-layered micro-bridge actuator, its bi-stability and two-way actuation, and thermo-mechanical behaviour have been carried out during the design phase. The studies lead to formulations of a new bi-stability design methodology, buckled shape and thermo-mechanical models. Finite element analysis using ANSYS and m...