MBE Growth and Characterization of SiGe Nanoislands
Isa Seker
Broschiertes Buch

MBE Growth and Characterization of SiGe Nanoislands

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SiGe nanoislands have been grown by Molecular Beam Epitaxy (MBE) on Si (100) substrates with various layer designs and growth conditions. Multilayered thin films of these structures with different thicknesses were fabricated by changing the substrate temperature, Ge content, annealing temperature and annealing duration. Structural properties of the surfaces were examined by Reflection High Energy Electron Diffraction (RHEED), Grazing Angle X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). The optical investigation was acquired by Dispersive Raman Sp...