Gas-Sensitive Thick-Film Elements for NOX Sensors
Fabrication and Properties
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Semiconductor metal-oxide chemical sensors with either thin-film or thick-film sensitive elements are widely used for monitoring chemical composition of atmosphere and technological gases. The industry of microelectronic chemical sensors has dynamically been growing all over the world since its rise in mid 1960s. The application of microelectronic technologies in chemical sensors has radically reduced their size and cut down costs for their production. Diminutiveness, large assortment, and low prices guarantee the active market for the devices today and excellent market perspectives in the fut...
Semiconductor metal-oxide chemical sensors with either thin-film or thick-film sensitive elements are widely used for monitoring chemical composition of atmosphere and technological gases. The industry of microelectronic chemical sensors has dynamically been growing all over the world since its rise in mid 1960s. The application of microelectronic technologies in chemical sensors has radically reduced their size and cut down costs for their production. Diminutiveness, large assortment, and low prices guarantee the active market for the devices today and excellent market perspectives in the future. In this book the author investigates thick films of WO3 and YBa2Cu3Ox (YBCO) as potential gas-sensitive elements for chemical sensors. Based on the research results, thick-film NOX sensors have been developed capable for operating in exhausts of combustion machines at 250-350° . The design and technology of the sensors are reported. The presented book describes the research and development in details and summarizes the obtained results. The book should be especially useful to professionals engaged in research and development in metal-oxide chemical sensors.
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