Geiger, Raynor

Gas Analysis

Herausgegeben von Geiger, William M.; Raynor, Mark W.

• Gebundenes Buch

Produktbeschreibung

This book provides analytical and industrial chemists with up-to-date coverage of the advances in measurement technology in gas analysis. It covers the introduction, theory, and operating principles of a wide range of instrumental techniques used in specialty gas analysis, including ICP-MS Analysis, FTIR techniques, new online sensor technologies, moisture analysis, gas chromatographic considerations, and gas mixtures and standards. The book also provides measurement strategies for gases in which none currently exist. Finally the book covers a wide range of practical applications of gas analysis including advantages, problems, and pitfalls.

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Explores the latest advances and applications of specialty and electronic gas analysis

The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental techniques available for specialty and electronic gas analysis. Moreover, the book details the advantages and disadvantages of each technique, steering readers away from common pitfalls.

Featuring contributions from leading analytical and industrial chemists, Trace Analysis of Specialty and Electronic Gases covers a wide range of practical industrial applications. The book begins with the historical development of gas analysis and then focuses on particular subjects or techniques such as:
Metals sampling and ICP-MS analysis
Improvements in FTIR spectroscopy
Water vapor analysis techniques
New infrared laser absorption spectroscopy approaches
GC/MS, GC/AED, and GC-ICP-MS techniques
Gas chromatography columns
Atmospheric pressure ionization mass spectrometry

Lastly, the book examines gas mixtures and standards that are critical for instrument calibration. There are also two appendices offering information on fittings and material compatibility.

With its thorough review of the literature and step-by-step guidance, Trace Analysis of Specialty and Electronic Gases enables researchers to take full advantage of the latest advances in gas analysis. Although the book's focus is the semiconductor and electronics industry, analytical chemists in other industries facing challenges with such issues as detection selectivity and sensitivity, matrix gas interference, and materials compatibility will also discover plenty of useful analytical approaches and techniques.

Produktdetails

• Verlag: Wiley & Sons
• 1. Auflage
• Seitenzahl: 386
• Erscheinungstermin: 3. Juli 2013
• Englisch
• Abmessung: 240mm x 161mm x 25mm
• Gewicht: 680g
• ISBN-13: 9781118065662
• ISBN-10: 1118065662
• Artikelnr.: 36729022

Autorenporträt

WILLIAM M. GEIGER, B.S., is Senior Partner of CONSCI, LTD, an independent service provider. He is responsible for implementation of analytical technology as it relates to gas analysis, including method development, turn-key instrumentation for customers, and consultation. Mr. Geiger has authored or coauthored numerous papers and presentations relating to trace gas measurement techniques. MARK W. RAYNOR, PhD, is Senior R&D Director at Matheson's Advanced Technology Center. He is responsible for the development of new gas products and precursors for the electronics industry, with an emphasis on the development of instrumental techniques for gas analysis as well as the synthesis, scale-up and purification of specialty gases. Dr Raynor has authored or coauthored more than sixty papers in analytical chemistry.

Inhaltsangabe

List of Figures xiii List of Tables xxix Foreword xxxiii Acknowledgments
xxxv Acronyms xxxvii 1 Introduction to Gas Analysis: Past and Future 1
Suhas N. Ketkar 1.1 The Beginning 2 1.2 Gas Chromatography 5 1.3 Ion
Chromatography 9 1.4 Mass Spectrometry 9 1.5 Ion Mobility Spectrometry 11
1.6 Optical Spectroscopy 11 1.7 Metals Analysis 12 1.8 Species Specific
Analyzers 13 1.9 Sensors 16 1.10 Future 16 References 17 2 Sample
Preparation and ICP-MS Analysis of Gases for Metals 21 Tracey Jacksier,
Kohei Tarutani and Martine Carre 2.1 Introduction 21 2.2 Extraction of
Impurities Before Analysis 22 2.3 Direct Analysis of ESGs 34 2.4 Conclusion
40 References 41 3 Novel Improvements in FTIR Analysis of Specialty Gases
43 Barbara Marshik and Jorge E. Pérez 3.1 Gas Phase Analysis Using FTIR
Spectroscopy 43 3.2 Gas Phase Effects on Spectral Line Shape 44 3.3 Effects
that Greatly Impact Quantification 55 3.4 Future Applications 68 References
69 4 Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas
Analysis 71 Frank K. Tittel, Rafal Lewicki, Robert Lascola and Scott
McWhorter 4.1 Introduction 71 4.2 Laser Absorption Spectroscopic Techniques
72 4.3 Applications of Semiconductor LAS Based Trace Gas Sensor Systems 88
4.4 Conclusions and Future Trends 99 References 100 5 Atmospheric Pressure
Ionization Mass Spectrometry for Bulk and Electronic Gas Analysis 111
Daniel R. Chase and Glenn M. Mitchell 5.1 Introduction 111 5.2 APIMS
Operating Principle 112 5.3 Point-to-Plane Corona Discharge Ionization 113
5.4 Factors Affecting Sensitivity in Point-to-Plane Corona Discharge APIMS
114 5.5 Applications of Point-to-Plane Corona Discharge APIMS in Bulk and
Electronic Gases 120 5.6 63Ni Beta (ß) Emitter APIMS 132 5.7 Specialty Gas
Analysis Application: Determination of Oxygenated Impurities in High Purity
Ammonia 136 5.8 Conclusion 144 References 144 6 GC/MS, GC/AED, and
GC-ICP-MS Analysis of Electronic Specialty Gases 151 Daniel Cowles, MarkW.
Raynor andWilliam M. Geiger 6.1 Introduction 151 6.2 GC/MS 153 6.3 GC/AED
164 6.4 GC-ICP-MS 173 6.5 Conclusions 191 References 191 7 Trace Water
Vapor Analysis in Specialty Gases: Sensor and Spectroscopic Approaches 195
Mark W. Raynor, Kris A. Bertness, Kevin C. Cossel, Florian Adler and Jun Ye
7.1 Introduction 195 7.2 Primary Standards for Water Vapor Measurement 197
7.3 Sensor Technologies 200 7.4 Spectroscopic Methods 211 7.5 Conclusion
239 References 240 8 Gas Chromatographic Column Considerations 251 Daron
Decker and Leonard M. Sidisky 8.1 Column Considerations with Packed Columns
252 8.2 Primary Selection Criteria for Capillary Columns 258 8.3
Applications 263 8.4 Future 272 8.5 Conclusion 272 References 273 9 Gas
Mixtures and Standards 275 Stephen Vaughan 9.1 Introduction 275 9.2
Definition of Gas Standards 276 9.3 Cylinders and Valves Sizes, Types, and
Material Compositions 280 9.4 Preparation Techniques for Gas Standards 284
9.5 Pressure Restrictions and Compressibility Considerations 290 9.6
Multi-Component Standards General Considerations 292 9.7 Cylinder Standard
Stability Consideration 293 9.8 Liquefied Compressed Gas Standards
Preparation Differences and Uses 295 9.9 Cylinder Standard Alternatives 297
9.10 Dilution Devices and Calibration Uses 297 References 299 A Cylinder
and Specialized Fittings 301 A.1 Cylinder Fittings 301 A.2 Specialized
Fittings 310 B Materials of Construction 321 B.1 Tubing, Transfer Lines and
Other Hardware 322 B.1.1 Valves 330 B.2 FTIR Materials 332 B.2.1
O-rings/Gaskets 334 B.2.2 Cells/Mirrors 334 Index 337