This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography.
This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography.
Dr Albert G. Baca received his BS in chemistry and mathematics at the University of New Mexico and his PhD in chemistry at the University of California, Berkeley. Since joining Sandia National Laboratories in 1990, he has conducted research and published on a wide range of compound semiconductor devices and processes. Prior to joining Sandia National Laboratories he worked at ATandT Bell Laboratories on GaAs FET technology from 1985-1990.
Inhaltsangabe
* Chapter 1: Introduction to GaAs devices * Chapter 2: Semiconductor properties, growth, characterisation and processing techniques * Chapter 3: Cleaning and passivation of GaAs and related alloys * Chapter 4: Wet etching and photolithography of GaAs and related alloys * Chapter 5: Dry etching of GaAs and related alloys * Chapter 6: Ohmic contacts * Chapter 7: Schottky contacts * Chapter 8: Field effect transistors * Chapter 9: Heterojunction bipolar transistors * Chapter 10: Wet oxidation for optoelectronic and MIS GaAs devices
* Chapter 1: Introduction to GaAs devices * Chapter 2: Semiconductor properties, growth, characterisation and processing techniques * Chapter 3: Cleaning and passivation of GaAs and related alloys * Chapter 4: Wet etching and photolithography of GaAs and related alloys * Chapter 5: Dry etching of GaAs and related alloys * Chapter 6: Ohmic contacts * Chapter 7: Schottky contacts * Chapter 8: Field effect transistors * Chapter 9: Heterojunction bipolar transistors * Chapter 10: Wet oxidation for optoelectronic and MIS GaAs devices
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