Aluminium Nitride based MEMS Acoustic Sensor
Vipul Vaibhav Mishra
Broschiertes Buch

Aluminium Nitride based MEMS Acoustic Sensor

Design Simulation and Fabrication

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Aluminium Nitride based Sensor details the design, simulation and fabrication of AlN based MEMS acoustic sensor for high sound pressure level measurement that is beneficial to researchers as well as to students seeking to better understand the sensor fabrication and become more efficient and productive in sensor technology. This book details the comparison between different piezoelectric materials properties. It covers the major features of the semiconductor fabrication steps with both practical and theoretical aspects, which should appeal to readers with variety of interests and needs. The au...