Advanced Silicon & Semiconducting Silicon-Alloy Based Materials & Devices

Herausgeber: Nijs, Jo

• Gebundenes Buch

Produktbeschreibung

One of the first books to cover advanced silicon-based technologies, this volume presents important directions for research into silicon, its alloy-based semiconducting devices, and its development in commercial applications. The book focuses on both single crystalline silicon and polycrystalline silicon, covering the chemistry and technology of material fabrication, physics and material properties, and device applications. It shows how the electronic and optical properties of SiGe strained layers make these materials suitable for advanced applications in high-speed transistors and diodes, and optical detectors for night vision systems. With contributors from leading academic and industrial research centers, the book contains extensive references to primary research papers.

Produktdetails

• Verlag: CRC Press
• Seitenzahl: 466
• Erscheinungstermin: 1. Januar 1994
• Englisch
• Abmessung: 234mm x 156mm x 27mm
• Gewicht: 857g
• ISBN-13: 9780750302999
• ISBN-10: 0750302992
• Artikelnr.: 21958673

Autorenporträt

Jonas F. A. Nijs

Inhaltsangabe

Preface. Introduction. Part one: Sincle crystalline silicon and its alloys.
Heavy doping effects in silicon (P/Van Miegham and R P Mertens). Defects in
crystalline silicon (C Claeys and J Vanhellemont). Molecular beam epitaxy
of silicon, silicon alloys and metals (E Kasper and C M Falco). Low thermal
budget chemical vapour deposition techniques for Si and SiGe (M R Caymax
and W Y Leong). Materials properties of (strained) SiGe layers (J
Poortmans, S C Jain, J Nijs and R Van Overstraeten). SiGe heterojunction
bipolar application (J Poortmans, S C Jain And J Nijs). Field-effect
transistors, infrared detectors, and resonant tunneling devices in
silicon/silicon-germanium and ^D*d-doped silicon (M Willander). Crystalline
silicon-carbide and its applications (T Sugii). Part Two: Polycrystalline
silicon. Large Grain Polysilicon Substrates for Solar Cells, Properties,
analysis and modelling of polysilicon TFTs (P Migliorato and M Quinn).
Application and Technology of polysilicon thin film transistors for liquid
crystal displays. (C Baert) The use of polycrystalline silicon and its
alloys in VLSI applications (M Y Ghannam). Biographical details. Keyword
index.