Ludmila Eckertová

Physics of Thin Films

• Broschiertes Buch

Produktbeschreibung

The investigation of the physical properties of matter has progressed so much during the last hundred years that today physics is divided into a large group of special branches, which are often very distant from each other. These branches arise because of the vast extent of the science itself, and are distinguished by the particular area studied, the method of investigation and so on. An independent and important branch that has developed recently is the physics of thin films. This deals with systems which have only one common property, namely, that one of their dimensions is very small, though all other physical properties of such systems may be different, as well as methods of investigating them. Usually, we investigate the physical characteristics of three-dimensional bodies. Their characteristic prop::!rties are often related to a unit volume, i.e. it is assumed that they are volume-independent. This assumption is legitimate as long as the dimensions are 'normal', i.e. more or less within macroscopic limits; but as soon as one dimension becomes so small that there is a considerable increase in a surface-to-volume ratio, that assumption is no longer valid.

Produktdetails

• Verlag: Springer / Springer US / Springer, Berlin
• Artikelnr. des Verlages: 978-1-4615-7591-7
• Softcover reprint of the original 1st ed. 1977
• Seitenzahl: 260
• Erscheinungstermin: 6. April 2012
• Englisch
• Abmessung: 229mm x 152mm x 15mm
• Gewicht: 385g
• ISBN-13: 9781461575917
• ISBN-10: 1461575915
• Artikelnr.: 39620097

Inhaltsangabe

1. Introduction.- 2. Methods of Preparation of Thin Films.- 2.1 Chemical and Electrochemical Methods.- 2.2 Cathode Sputtering.- 2.3 Vacuum Evaporation.- 3. Thin Film Thickness and Deposition Rate Measurement Methods.- 3.1 Balance Methods.- 3.2 Electrical Methods.- 3.3 Optical Methods.- 3.4 Deposition Rate Monitoring Using Transfer of Momentum.- 3.5 Special Thickness Monitoring Methods.- 4. Mechanism of Film Formation.- 4.1 Formation Stages of Thin Films.- 4.2 Nucleation.- 4.3 Growth and Coalescence of Islands.- 4.4 Influence of Various Factors on Final Structure of Film.- 4.5 Crystallographic Structure of Thin Films.- 4.6 Epitaxial Films.- 5. Composition, Morphology and Structure of Thin Films.- 5.1 Methods for Determination of Chemical Composition of Films.- 5.2 Electron Microscopy of Thin Films.- 5.3 Diffraction of Electrons.- 5.4 X-ray Methods.- 5.5 Auger Spectroscopy.- 6. Properties of Thin Films.- 6.1 Mechanical Properties.- 6.2 Electrical and Magnetic Properties of Thin Films.- 6.3 Optical Properties of Thin Films.- 7. Application of This Films.- 7.1 Optical Applications.- 7.2 Applications in Electronics.- References.