Nicolae Lobontiu

Dynamics of Microelectromechanical Systems (eBook, PDF)

• Format: PDF

Produktbeschreibung

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

• An in-depth treatment of problems that involve reliable modeling, analysis and design,



• Analytical models with correct dependences on service dimensions,



• Cantilever based systems for nanofabrication researchers and designers, and



• Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

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Produktdetails

• Verlag: Springer-Verlag GmbH
• Seitenzahl: 403
• Erscheinungstermin: 8. Juli 2014
• Englisch
• ISBN-13: 9780387681955
• Artikelnr.: 43728434

Autorenporträt

Nicolae Lobontiu, University of Alaska, Anchorage, AK, USA

Inhaltsangabe

Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS.