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This accessible volume delivers a complete design methodology formicroelectromechanical systems (MEMS). Focusing on the scaling ofan autonomous micro-system, it explains the real-world problems andtheoretical concepts of several different aspects inherent to theminiaturization of sensors and actuators. It reports on theanalysis of dimensional scaling, the modelling, design andexperimental characterization of a wide range of specific devicesand applications, including: * temperature microsensors based on an integrated complementarymetal-oxide-semiconductor (CMOS) thermocouple; * mechanical…mehr

Produktbeschreibung
This accessible volume delivers a complete design methodology formicroelectromechanical systems (MEMS). Focusing on the scaling ofan autonomous micro-system, it explains the real-world problems andtheoretical concepts of several different aspects inherent to theminiaturization of sensors and actuators. It reports on theanalysis of dimensional scaling, the modelling, design andexperimental characterization of a wide range of specific devicesand applications, including: * temperature microsensors based on an integrated complementarymetal-oxide-semiconductor (CMOS) thermocouple; * mechanical sensors; * inductive microsensors for the detection of magneticparticles; * electrostatic, thermal and magnetic actuators. With an original approach, this informative text encompasses theentire range of themes currently at the forefront of MEMS,including an analysis of the importantissue of energy sources inMEMS. In addition, the book explores contemporary research into thedesign of complete MEMS with a case study on colonies ofmicrobots. Scaling Issues and Design of MEMS aims to improve thereader's basic knowledge on modelling issues of complex microdevices, and to encourage new thinking about scaling effects. Itwill provide support for practising engineers working within thedefence industry and will also be of welcome interest to graduatestudents and researchers with a background in electronicengineering, physics, chemistry, biology and materials science.

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  • Produktdetails
  • Verlag: John Wiley & Sons
  • Seitenzahl: 244
  • Erscheinungstermin: 31. Juli 2008
  • Englisch
  • ISBN-13: 9780470034088
  • Artikelnr.: 37289777
Autorenporträt
Salvatore Baglio, Associate Professor of ElectronicInstrumentations and Measurements, University of Catania,Italy. Salvatore Baglio has co-authored over 150 scientificpublications and his research interests include nonlinear andchaotic dynamical systems, smart sensors, microsensors andMicrosystems. Salvatore Castorina, Electrical and ElectronicMeasurements Group, University of Catania. SalvatoreCastorina is co-author of over 20 scientific papers and hisresearch interests include micro and nano electromechanicalsystems, magnetic and thermal, micro sensors and micro actuators,micro and nano robotics. Luigi Fortuna, Professor of System Theory, University ofCatania. Luigi Fortuna has published more than 280 technicalpapers and his interests include nonlinear science and complexity,chaos and cellular neural networks. NicolòSavalli, Engineering Faculty,University of Catania. Nicolò Savalli teaches courses inMeasurement Theory and Measurement Applications and is co-author ofmore than 35 scientific publications. His research interestsinclude micro-electro-mechanical-systems (MEMS) andmicro-opto-electro-mechanical-systems (MOEMS).
Inhaltsangabe
Preface.Introduction.1. Scaling of MEMS.2. Scaling of Microactuators - an Overview.3. Scaling of Thermal Sensors.4. Inductive Sensors for Magnetic Fields.5. Scaling of Mechanical Sensors.6. Scaling of Energy Sources.7. Technologies and Architectures for Autonomous MEMS Microrobots.8. Moving towards the Nanoscale.9. Examples of Scaling Effects Analysis - DIEES-MEMSLAB.10. Concluding Remarks.Index.