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As the ability to produce nanomaterials advances, it becomes more important to understand how the energy of the atoms in these materials is affected by their reduced dimensions. Written by an acclaimed author team, Kinetics in Nanoscale Materials is the first book to discuss simple but effective models of the systems and processes that have recently been discovered. The text, for researchers and graduate students, combines the novelty of nanoscale processes and systems with the transparency of mathematical models and generality of basic ideas relating to nanoscience and nanotechnology.
- Geräte: PC
- eBook Hilfe
As the ability to produce nanomaterials advances, it becomes more important to understand how the energy of the atoms in these materials is affected by their reduced dimensions. Written by an acclaimed author team, Kinetics in Nanoscale Materials is the first book to discuss simple but effective models of the systems and processes that have recently been discovered. The text, for researchers and graduate students, combines the novelty of nanoscale processes and systems with the transparency of mathematical models and generality of basic ideas relating to nanoscience and nanotechnology.
Produktdetails
- Produktdetails
- Verlag: John Wiley & Sons
- Seitenzahl: 312
- Erscheinungstermin: 12. Mai 2014
- Englisch
- ISBN-13: 9781118742877
- Artikelnr.: 41004227
- Verlag: John Wiley & Sons
- Seitenzahl: 312
- Erscheinungstermin: 12. Mai 2014
- Englisch
- ISBN-13: 9781118742877
- Artikelnr.: 41004227
KING-NING TU, PhD, is Professor in the Department of Materials Science and Engineering at the University of California, Los Angeles. His research focuses on kinetic processes in thin films, metal-silicon interfaces, electromigration, lead-free solder metallurgy, and point contact reactions on silicon nanowires. ANDRIY M. GUSAK, PhD, is Chair and Professor in the Department of Physics at Cherkasy National University. His research explores nanomaterial science and kinetics of nanoscale systems, with an emphasis on the development of microelectronic materials.
PREFACE ix CHAPTER 1 INTRODUCTION TO KINETICS IN NANOSCALE MATERIALS 1 1.1
Introduction 1 1.2 Nanosphere: Surface Energy is Equivalent to
Gibbs-Thomson Potential 3 1.3 Nanosphere: Lower Melting Point 6 1.4
Nanosphere: Fewer Homogeneous Nucleation and its Effect on Phase Diagram 10
1.5 Nanosphere: Kirkendall Effect and Instability of Hollow Nanospheres 13
1.6 Nanosphere: Inverse Kirkendall Effect in Hollow Nano Alloy Spheres 17
1.7 Nanosphere: Combining Kirkendall Effect and Inverse Kirkendall Effect
on Concentric Bilayer Hollow Nanosphere 18 1.8 Nano Hole: Instability of a
Donut-Type Nano Hole in a Membrane 19 1.9 Nanowire: Point Contact Reactions
Between Metal and Silicon Nanowires 21 1.10 Nanowire: Nanogap in Silicon
Nanowires 22 1.11 Nanowire: Lithiation in Silicon Nanowires 26 1.12
Nanowire: Point Contact Reactions Between Metallic Nanowires 27 1.13 Nano
Thin Film: Explosive Reaction in Periodic Multilayered Nano Thin Films 28
1.14 Nano Microstructure in Bulk Samples: Nanotwins 30 1.15 Nano
Microstructure on the Surface of a Bulk Sample: Surface Mechanical
Attrition Treatment (SMAT) of Steel 32 References 33 Problems 35 CHAPTER 2
LINEAR AND NONLINEAR DIFFUSION 37 2.1 Introduction 37 2.2 Linear Diffusion
38 2.2.1 Atomic Flux 39 2.2.2 Fick's First Law of Diffusion 40 2.2.3
Chemical Potential 43 2.2.4 Fick's Second Law of Diffusion 45 2.2.5 Flux
Divergence 47 2.2.6 Tracer Diffusion 49 2.2.7 Diffusivity 51 2.2.8
Experimental Measurement of the Parameters in Diffusivity 53 2.3 Nonlinear
Diffusion 57 2.3.1 Nonlinear Effect due to Kinetic Consideration 58 2.3.2
Nonlinear Effect due to Thermodynamic Consideration 59 2.3.3 Combining
Thermodynamic and Kinetic Nonlinear Effects 62 References 63 Problems 64
CHAPTER 3 KIRKENDALL EFFECT AND INVERSE KIRKENDALL EFFECT 67 3.1
Introduction 67 3.2 Kirkendall Effect 69 3.2.1 Darken's Analysis of
Kirkendall Shift and Marker Motion 72 3.2.2 Boltzmann and Matano Analysis
of Interdiffusion Coefficient 76 3.2.3 Activity and Intrinsic Diffusivity
80 3.2.4 Kirkendall (Frenkel) Voiding Without Lattice Shift 84 3.3 Inverse
Kirkendall Effect 84 3.3.1 Physical Meaning of Inverse Kirkendall Effect 86
3.3.2 Inverse Kirkendall Effect on the Instability of an Alloy Nanoshell 88
3.3.3 Inverse Kirkendall Effect on Segregation in a Regular Solution
Nanoshell 90 3.4 Interaction Between Kirkendall Effect and Gibbs-Thomson
Effect in the Formation of a Spherical Compound Nanoshell 93 References 97
Problems 97 CHAPTER 4 RIPENING AMONG NANOPRECIPITATES 99 4.1 Introduction
99 4.2 Ham's Model of Growth of a Spherical Precipitate (Cr is Constant)
101 4.3 Mean-Field Consideration 103 4.4 Gibbs-Thomson Potential 105 4.5
Growth and Dissolution of a Spherical Nanoprecipitate in a Mean Field 106
4.6 LSW Theory of Kinetics of Particle Ripening 108 4.7 Continuity Equation
in Size Space 113 4.8 Size Distribution Function in Conservative Ripening
114 4.9 Further Developments of LSW Theory 115 References 115 Problems 116
CHAPTER 5 SPINODAL DECOMPOSITION 118 5.1 Introduction 118 5.2 Implication
of Diffusion Equation in Homogenization and Decomposition 121 5.3 Spinodal
Decomposition 123 5.3.1 Concentration Gradient in an Inhomogeneous Solid
Solution 123 5.3.2 Energy of Mixing to Form a Homogeneous Solid Solution
124 5.3.3 Energy of Mixing to Form an Inhomogeneous Solid Solution 126
5.3.4 Chemical Potential in Inhomogeneous Solution 129 5.3.5 Coherent
Strain Energy 131 5.3.6 Solution of the Diffusion Equation 134 References
136 Problems 136 CHAPTER 6 NUCLEATION EVENTS IN BULK MATERIALS, THIN FILMS,
AND NANOWIRES 138 6.1 Introduction 138 6.2 Thermodynamics and Kinetics of
Nucleation 140 6.2.1 Thermodynamics of Nucleation 140 6.2.2 Kinetics of
Nucleation 143 6.3 Heterogeneous Nucleation in Grain Boundaries of Bulk
Materials 148 6.3.1 Morphology of Grain Boundary Precipitates 150 6.3.2
Introducing an Epitaxial Interface to Heterogeneous Nucleation 151 6.3.3
Replacive Mechanism of a Grain Boundary 154 6.4 No Homogeneous Nucleation
in Epitaxial Growth of Si Thin Film on Si Wafer 156 6.5 Repeating
Homogeneous Nucleation of Silicide in Nanowires of Si 160 6.5.1 Point
Contact Reactions in Nanowires 161 6.5.2 Homogeneous Nucleation of
Epitaxial Silicide in Nanowires of Si 164 References 168 Problems 168
CHAPTER 7 CONTACT REACTIONS ON Si; PLANE, LINE, AND POINT CONTACT REACTIONS
170 7.1 Introduction 170 7.2 Bulk Cases 175 7.2.1 Kidson's Analysis of
Diffusion-Controlled Planar Growth 175 7.2.2 Steady State Approximation in
Layered Growth of Multiple Phases 178 7.2.3 Marker Analysis 179 7.2.4
Interdiffusion Coefficient in Intermetallic Compound 182 7.2.5 Wagner
Diffusivity 186 7.3 Thin Film Cases 187 7.3.1 Diffusion-Controlled and
Interfacial-Reaction-Controlled Growth 187 7.3.2 Kinetics of
Interfacial-Reaction-Controlled Growth 188 7.3.3 Kinetics of Competitive
Growth of Two-Layered Phases 193 7.3.4 First Phase in Silicide Formation
194 7.4 Nanowire Cases 196 7.4.1 Point Contact Reactions 197 7.4.2 Line
Contact Reactions 202 7.4.3 Planar Contact Reactions 208 References 208
Problems 209 CHAPTER 8 GRAIN GROWTH IN MICRO AND NANOSCALE 211 8.1
Introduction 211 8.2 How to Generate a Polycrystalline Microstructure 213
8.3 Computer Simulation of Grain Growth 216 8.3.1 Atomistic Simulation
Based on Monte Carlo Method 216 8.3.2 Phenomenological Simulations 217 8.4
Statistical Distribution Functions of Grain Size 219 8.5 Deterministic
(Dynamic) Approach to Grain Growth 221 8.6 Coupling Between Grain Growth of
a Central Grain and the Rest of Grains 225 8.7 Decoupling the Grain Growth
of a Central Grain from the Rest of Grains in the Normalized Size Space 226
8.8 Grain Growth in 2D Case in the Normalized Size Space 229 8.9 Grain
Rotation 231 8.9.1 Grain Rotation in Anisotropic Thin Films Under
Electromigration 232 References 237 Problems 238 CHAPTER 9 SELF-SUSTAINED
REACTIONS IN NANOSCALE MULTILAYERED THIN FILMS 240 9.1 Introduction 240 9.2
The Selection of a Pair of Metallic Thin Films for SHS 243 9.3 A Simple
Model of Single-Phase Growth in Self-Sustained Reaction 245 9.4 A Simple
Estimate of Flame Velocity in Steady State Heat Transfer 250 9.5 Comparison
in Phase Formation by Annealing and by Explosive Reaction in Al/Ni 251 9.6
Self-Explosive Silicidation Reactions 251 References 255 Problems 256
CHAPTER 10 FORMATION AND TRANSFORMATIONS OF NANOTWINS IN COPPER 258 10.1
Introduction 258 10.2 Formation of Nanotwins in Cu 260 10.2.1 First
Principle Calculation of Energy of Formation of Nanotwins 260 10.2.2 In
Situ Measurement of Stress Evolution for Nanotwin Formation During Pulse
Electrodeposition of Cu 264 10.2.3 Formation of Nanotwin Cu in
Through-Silicon Vias 266 10.3 Formation and Transformation of Oriented
Nanotwins in Cu 269 10.3.1 Formation of Oriented Nanotwins in Cu 270 10.3.2
Unidirectional Growth of Cu-Sn Intermetallic Compound on Oriented and
Nanotwinned Cu 270 10.3.3 Transformation of (111) Oriented and Nanotwinned
Cu to (100) Oriented Single Crystal of Cu 274 10.4 Potential Applications
of Nanotwinned Cu 276 10.4.1 To Reduce Electromigration in Interconnect
Technology 276 10.4.2 To Eliminate Kirkendall Voids in Microbump Packaging
Technology 277 References 278 Problems 278 APPENDIX A LAPLACE PRESSURE IN
NONSPHERICAL NANOPARTICLE 280 APPENDIX B INTERDIFFUSION COEFFICIENT ? D =
CBMG'' 282 APPENDIX C NONEQUILIBRIUM VACANCIES AND CROSS-EFFECTS ON
INTERDIFFUSION IN A PSEUDO-TERNARY ALLOY 285 APPENDIX D INTERACTION BETWEEN
KIRKENDALL EFFECT AND GIBBS-THOMSON EFFECT IN THE FORMATION OF A SPHERICAL
COMPOUND NANOSHELL 289 INDEX 293
Introduction 1 1.2 Nanosphere: Surface Energy is Equivalent to
Gibbs-Thomson Potential 3 1.3 Nanosphere: Lower Melting Point 6 1.4
Nanosphere: Fewer Homogeneous Nucleation and its Effect on Phase Diagram 10
1.5 Nanosphere: Kirkendall Effect and Instability of Hollow Nanospheres 13
1.6 Nanosphere: Inverse Kirkendall Effect in Hollow Nano Alloy Spheres 17
1.7 Nanosphere: Combining Kirkendall Effect and Inverse Kirkendall Effect
on Concentric Bilayer Hollow Nanosphere 18 1.8 Nano Hole: Instability of a
Donut-Type Nano Hole in a Membrane 19 1.9 Nanowire: Point Contact Reactions
Between Metal and Silicon Nanowires 21 1.10 Nanowire: Nanogap in Silicon
Nanowires 22 1.11 Nanowire: Lithiation in Silicon Nanowires 26 1.12
Nanowire: Point Contact Reactions Between Metallic Nanowires 27 1.13 Nano
Thin Film: Explosive Reaction in Periodic Multilayered Nano Thin Films 28
1.14 Nano Microstructure in Bulk Samples: Nanotwins 30 1.15 Nano
Microstructure on the Surface of a Bulk Sample: Surface Mechanical
Attrition Treatment (SMAT) of Steel 32 References 33 Problems 35 CHAPTER 2
LINEAR AND NONLINEAR DIFFUSION 37 2.1 Introduction 37 2.2 Linear Diffusion
38 2.2.1 Atomic Flux 39 2.2.2 Fick's First Law of Diffusion 40 2.2.3
Chemical Potential 43 2.2.4 Fick's Second Law of Diffusion 45 2.2.5 Flux
Divergence 47 2.2.6 Tracer Diffusion 49 2.2.7 Diffusivity 51 2.2.8
Experimental Measurement of the Parameters in Diffusivity 53 2.3 Nonlinear
Diffusion 57 2.3.1 Nonlinear Effect due to Kinetic Consideration 58 2.3.2
Nonlinear Effect due to Thermodynamic Consideration 59 2.3.3 Combining
Thermodynamic and Kinetic Nonlinear Effects 62 References 63 Problems 64
CHAPTER 3 KIRKENDALL EFFECT AND INVERSE KIRKENDALL EFFECT 67 3.1
Introduction 67 3.2 Kirkendall Effect 69 3.2.1 Darken's Analysis of
Kirkendall Shift and Marker Motion 72 3.2.2 Boltzmann and Matano Analysis
of Interdiffusion Coefficient 76 3.2.3 Activity and Intrinsic Diffusivity
80 3.2.4 Kirkendall (Frenkel) Voiding Without Lattice Shift 84 3.3 Inverse
Kirkendall Effect 84 3.3.1 Physical Meaning of Inverse Kirkendall Effect 86
3.3.2 Inverse Kirkendall Effect on the Instability of an Alloy Nanoshell 88
3.3.3 Inverse Kirkendall Effect on Segregation in a Regular Solution
Nanoshell 90 3.4 Interaction Between Kirkendall Effect and Gibbs-Thomson
Effect in the Formation of a Spherical Compound Nanoshell 93 References 97
Problems 97 CHAPTER 4 RIPENING AMONG NANOPRECIPITATES 99 4.1 Introduction
99 4.2 Ham's Model of Growth of a Spherical Precipitate (Cr is Constant)
101 4.3 Mean-Field Consideration 103 4.4 Gibbs-Thomson Potential 105 4.5
Growth and Dissolution of a Spherical Nanoprecipitate in a Mean Field 106
4.6 LSW Theory of Kinetics of Particle Ripening 108 4.7 Continuity Equation
in Size Space 113 4.8 Size Distribution Function in Conservative Ripening
114 4.9 Further Developments of LSW Theory 115 References 115 Problems 116
CHAPTER 5 SPINODAL DECOMPOSITION 118 5.1 Introduction 118 5.2 Implication
of Diffusion Equation in Homogenization and Decomposition 121 5.3 Spinodal
Decomposition 123 5.3.1 Concentration Gradient in an Inhomogeneous Solid
Solution 123 5.3.2 Energy of Mixing to Form a Homogeneous Solid Solution
124 5.3.3 Energy of Mixing to Form an Inhomogeneous Solid Solution 126
5.3.4 Chemical Potential in Inhomogeneous Solution 129 5.3.5 Coherent
Strain Energy 131 5.3.6 Solution of the Diffusion Equation 134 References
136 Problems 136 CHAPTER 6 NUCLEATION EVENTS IN BULK MATERIALS, THIN FILMS,
AND NANOWIRES 138 6.1 Introduction 138 6.2 Thermodynamics and Kinetics of
Nucleation 140 6.2.1 Thermodynamics of Nucleation 140 6.2.2 Kinetics of
Nucleation 143 6.3 Heterogeneous Nucleation in Grain Boundaries of Bulk
Materials 148 6.3.1 Morphology of Grain Boundary Precipitates 150 6.3.2
Introducing an Epitaxial Interface to Heterogeneous Nucleation 151 6.3.3
Replacive Mechanism of a Grain Boundary 154 6.4 No Homogeneous Nucleation
in Epitaxial Growth of Si Thin Film on Si Wafer 156 6.5 Repeating
Homogeneous Nucleation of Silicide in Nanowires of Si 160 6.5.1 Point
Contact Reactions in Nanowires 161 6.5.2 Homogeneous Nucleation of
Epitaxial Silicide in Nanowires of Si 164 References 168 Problems 168
CHAPTER 7 CONTACT REACTIONS ON Si; PLANE, LINE, AND POINT CONTACT REACTIONS
170 7.1 Introduction 170 7.2 Bulk Cases 175 7.2.1 Kidson's Analysis of
Diffusion-Controlled Planar Growth 175 7.2.2 Steady State Approximation in
Layered Growth of Multiple Phases 178 7.2.3 Marker Analysis 179 7.2.4
Interdiffusion Coefficient in Intermetallic Compound 182 7.2.5 Wagner
Diffusivity 186 7.3 Thin Film Cases 187 7.3.1 Diffusion-Controlled and
Interfacial-Reaction-Controlled Growth 187 7.3.2 Kinetics of
Interfacial-Reaction-Controlled Growth 188 7.3.3 Kinetics of Competitive
Growth of Two-Layered Phases 193 7.3.4 First Phase in Silicide Formation
194 7.4 Nanowire Cases 196 7.4.1 Point Contact Reactions 197 7.4.2 Line
Contact Reactions 202 7.4.3 Planar Contact Reactions 208 References 208
Problems 209 CHAPTER 8 GRAIN GROWTH IN MICRO AND NANOSCALE 211 8.1
Introduction 211 8.2 How to Generate a Polycrystalline Microstructure 213
8.3 Computer Simulation of Grain Growth 216 8.3.1 Atomistic Simulation
Based on Monte Carlo Method 216 8.3.2 Phenomenological Simulations 217 8.4
Statistical Distribution Functions of Grain Size 219 8.5 Deterministic
(Dynamic) Approach to Grain Growth 221 8.6 Coupling Between Grain Growth of
a Central Grain and the Rest of Grains 225 8.7 Decoupling the Grain Growth
of a Central Grain from the Rest of Grains in the Normalized Size Space 226
8.8 Grain Growth in 2D Case in the Normalized Size Space 229 8.9 Grain
Rotation 231 8.9.1 Grain Rotation in Anisotropic Thin Films Under
Electromigration 232 References 237 Problems 238 CHAPTER 9 SELF-SUSTAINED
REACTIONS IN NANOSCALE MULTILAYERED THIN FILMS 240 9.1 Introduction 240 9.2
The Selection of a Pair of Metallic Thin Films for SHS 243 9.3 A Simple
Model of Single-Phase Growth in Self-Sustained Reaction 245 9.4 A Simple
Estimate of Flame Velocity in Steady State Heat Transfer 250 9.5 Comparison
in Phase Formation by Annealing and by Explosive Reaction in Al/Ni 251 9.6
Self-Explosive Silicidation Reactions 251 References 255 Problems 256
CHAPTER 10 FORMATION AND TRANSFORMATIONS OF NANOTWINS IN COPPER 258 10.1
Introduction 258 10.2 Formation of Nanotwins in Cu 260 10.2.1 First
Principle Calculation of Energy of Formation of Nanotwins 260 10.2.2 In
Situ Measurement of Stress Evolution for Nanotwin Formation During Pulse
Electrodeposition of Cu 264 10.2.3 Formation of Nanotwin Cu in
Through-Silicon Vias 266 10.3 Formation and Transformation of Oriented
Nanotwins in Cu 269 10.3.1 Formation of Oriented Nanotwins in Cu 270 10.3.2
Unidirectional Growth of Cu-Sn Intermetallic Compound on Oriented and
Nanotwinned Cu 270 10.3.3 Transformation of (111) Oriented and Nanotwinned
Cu to (100) Oriented Single Crystal of Cu 274 10.4 Potential Applications
of Nanotwinned Cu 276 10.4.1 To Reduce Electromigration in Interconnect
Technology 276 10.4.2 To Eliminate Kirkendall Voids in Microbump Packaging
Technology 277 References 278 Problems 278 APPENDIX A LAPLACE PRESSURE IN
NONSPHERICAL NANOPARTICLE 280 APPENDIX B INTERDIFFUSION COEFFICIENT ? D =
CBMG'' 282 APPENDIX C NONEQUILIBRIUM VACANCIES AND CROSS-EFFECTS ON
INTERDIFFUSION IN A PSEUDO-TERNARY ALLOY 285 APPENDIX D INTERACTION BETWEEN
KIRKENDALL EFFECT AND GIBBS-THOMSON EFFECT IN THE FORMATION OF A SPHERICAL
COMPOUND NANOSHELL 289 INDEX 293
PREFACE ix CHAPTER 1 INTRODUCTION TO KINETICS IN NANOSCALE MATERIALS 1 1.1
Introduction 1 1.2 Nanosphere: Surface Energy is Equivalent to
Gibbs-Thomson Potential 3 1.3 Nanosphere: Lower Melting Point 6 1.4
Nanosphere: Fewer Homogeneous Nucleation and its Effect on Phase Diagram 10
1.5 Nanosphere: Kirkendall Effect and Instability of Hollow Nanospheres 13
1.6 Nanosphere: Inverse Kirkendall Effect in Hollow Nano Alloy Spheres 17
1.7 Nanosphere: Combining Kirkendall Effect and Inverse Kirkendall Effect
on Concentric Bilayer Hollow Nanosphere 18 1.8 Nano Hole: Instability of a
Donut-Type Nano Hole in a Membrane 19 1.9 Nanowire: Point Contact Reactions
Between Metal and Silicon Nanowires 21 1.10 Nanowire: Nanogap in Silicon
Nanowires 22 1.11 Nanowire: Lithiation in Silicon Nanowires 26 1.12
Nanowire: Point Contact Reactions Between Metallic Nanowires 27 1.13 Nano
Thin Film: Explosive Reaction in Periodic Multilayered Nano Thin Films 28
1.14 Nano Microstructure in Bulk Samples: Nanotwins 30 1.15 Nano
Microstructure on the Surface of a Bulk Sample: Surface Mechanical
Attrition Treatment (SMAT) of Steel 32 References 33 Problems 35 CHAPTER 2
LINEAR AND NONLINEAR DIFFUSION 37 2.1 Introduction 37 2.2 Linear Diffusion
38 2.2.1 Atomic Flux 39 2.2.2 Fick's First Law of Diffusion 40 2.2.3
Chemical Potential 43 2.2.4 Fick's Second Law of Diffusion 45 2.2.5 Flux
Divergence 47 2.2.6 Tracer Diffusion 49 2.2.7 Diffusivity 51 2.2.8
Experimental Measurement of the Parameters in Diffusivity 53 2.3 Nonlinear
Diffusion 57 2.3.1 Nonlinear Effect due to Kinetic Consideration 58 2.3.2
Nonlinear Effect due to Thermodynamic Consideration 59 2.3.3 Combining
Thermodynamic and Kinetic Nonlinear Effects 62 References 63 Problems 64
CHAPTER 3 KIRKENDALL EFFECT AND INVERSE KIRKENDALL EFFECT 67 3.1
Introduction 67 3.2 Kirkendall Effect 69 3.2.1 Darken's Analysis of
Kirkendall Shift and Marker Motion 72 3.2.2 Boltzmann and Matano Analysis
of Interdiffusion Coefficient 76 3.2.3 Activity and Intrinsic Diffusivity
80 3.2.4 Kirkendall (Frenkel) Voiding Without Lattice Shift 84 3.3 Inverse
Kirkendall Effect 84 3.3.1 Physical Meaning of Inverse Kirkendall Effect 86
3.3.2 Inverse Kirkendall Effect on the Instability of an Alloy Nanoshell 88
3.3.3 Inverse Kirkendall Effect on Segregation in a Regular Solution
Nanoshell 90 3.4 Interaction Between Kirkendall Effect and Gibbs-Thomson
Effect in the Formation of a Spherical Compound Nanoshell 93 References 97
Problems 97 CHAPTER 4 RIPENING AMONG NANOPRECIPITATES 99 4.1 Introduction
99 4.2 Ham's Model of Growth of a Spherical Precipitate (Cr is Constant)
101 4.3 Mean-Field Consideration 103 4.4 Gibbs-Thomson Potential 105 4.5
Growth and Dissolution of a Spherical Nanoprecipitate in a Mean Field 106
4.6 LSW Theory of Kinetics of Particle Ripening 108 4.7 Continuity Equation
in Size Space 113 4.8 Size Distribution Function in Conservative Ripening
114 4.9 Further Developments of LSW Theory 115 References 115 Problems 116
CHAPTER 5 SPINODAL DECOMPOSITION 118 5.1 Introduction 118 5.2 Implication
of Diffusion Equation in Homogenization and Decomposition 121 5.3 Spinodal
Decomposition 123 5.3.1 Concentration Gradient in an Inhomogeneous Solid
Solution 123 5.3.2 Energy of Mixing to Form a Homogeneous Solid Solution
124 5.3.3 Energy of Mixing to Form an Inhomogeneous Solid Solution 126
5.3.4 Chemical Potential in Inhomogeneous Solution 129 5.3.5 Coherent
Strain Energy 131 5.3.6 Solution of the Diffusion Equation 134 References
136 Problems 136 CHAPTER 6 NUCLEATION EVENTS IN BULK MATERIALS, THIN FILMS,
AND NANOWIRES 138 6.1 Introduction 138 6.2 Thermodynamics and Kinetics of
Nucleation 140 6.2.1 Thermodynamics of Nucleation 140 6.2.2 Kinetics of
Nucleation 143 6.3 Heterogeneous Nucleation in Grain Boundaries of Bulk
Materials 148 6.3.1 Morphology of Grain Boundary Precipitates 150 6.3.2
Introducing an Epitaxial Interface to Heterogeneous Nucleation 151 6.3.3
Replacive Mechanism of a Grain Boundary 154 6.4 No Homogeneous Nucleation
in Epitaxial Growth of Si Thin Film on Si Wafer 156 6.5 Repeating
Homogeneous Nucleation of Silicide in Nanowires of Si 160 6.5.1 Point
Contact Reactions in Nanowires 161 6.5.2 Homogeneous Nucleation of
Epitaxial Silicide in Nanowires of Si 164 References 168 Problems 168
CHAPTER 7 CONTACT REACTIONS ON Si; PLANE, LINE, AND POINT CONTACT REACTIONS
170 7.1 Introduction 170 7.2 Bulk Cases 175 7.2.1 Kidson's Analysis of
Diffusion-Controlled Planar Growth 175 7.2.2 Steady State Approximation in
Layered Growth of Multiple Phases 178 7.2.3 Marker Analysis 179 7.2.4
Interdiffusion Coefficient in Intermetallic Compound 182 7.2.5 Wagner
Diffusivity 186 7.3 Thin Film Cases 187 7.3.1 Diffusion-Controlled and
Interfacial-Reaction-Controlled Growth 187 7.3.2 Kinetics of
Interfacial-Reaction-Controlled Growth 188 7.3.3 Kinetics of Competitive
Growth of Two-Layered Phases 193 7.3.4 First Phase in Silicide Formation
194 7.4 Nanowire Cases 196 7.4.1 Point Contact Reactions 197 7.4.2 Line
Contact Reactions 202 7.4.3 Planar Contact Reactions 208 References 208
Problems 209 CHAPTER 8 GRAIN GROWTH IN MICRO AND NANOSCALE 211 8.1
Introduction 211 8.2 How to Generate a Polycrystalline Microstructure 213
8.3 Computer Simulation of Grain Growth 216 8.3.1 Atomistic Simulation
Based on Monte Carlo Method 216 8.3.2 Phenomenological Simulations 217 8.4
Statistical Distribution Functions of Grain Size 219 8.5 Deterministic
(Dynamic) Approach to Grain Growth 221 8.6 Coupling Between Grain Growth of
a Central Grain and the Rest of Grains 225 8.7 Decoupling the Grain Growth
of a Central Grain from the Rest of Grains in the Normalized Size Space 226
8.8 Grain Growth in 2D Case in the Normalized Size Space 229 8.9 Grain
Rotation 231 8.9.1 Grain Rotation in Anisotropic Thin Films Under
Electromigration 232 References 237 Problems 238 CHAPTER 9 SELF-SUSTAINED
REACTIONS IN NANOSCALE MULTILAYERED THIN FILMS 240 9.1 Introduction 240 9.2
The Selection of a Pair of Metallic Thin Films for SHS 243 9.3 A Simple
Model of Single-Phase Growth in Self-Sustained Reaction 245 9.4 A Simple
Estimate of Flame Velocity in Steady State Heat Transfer 250 9.5 Comparison
in Phase Formation by Annealing and by Explosive Reaction in Al/Ni 251 9.6
Self-Explosive Silicidation Reactions 251 References 255 Problems 256
CHAPTER 10 FORMATION AND TRANSFORMATIONS OF NANOTWINS IN COPPER 258 10.1
Introduction 258 10.2 Formation of Nanotwins in Cu 260 10.2.1 First
Principle Calculation of Energy of Formation of Nanotwins 260 10.2.2 In
Situ Measurement of Stress Evolution for Nanotwin Formation During Pulse
Electrodeposition of Cu 264 10.2.3 Formation of Nanotwin Cu in
Through-Silicon Vias 266 10.3 Formation and Transformation of Oriented
Nanotwins in Cu 269 10.3.1 Formation of Oriented Nanotwins in Cu 270 10.3.2
Unidirectional Growth of Cu-Sn Intermetallic Compound on Oriented and
Nanotwinned Cu 270 10.3.3 Transformation of (111) Oriented and Nanotwinned
Cu to (100) Oriented Single Crystal of Cu 274 10.4 Potential Applications
of Nanotwinned Cu 276 10.4.1 To Reduce Electromigration in Interconnect
Technology 276 10.4.2 To Eliminate Kirkendall Voids in Microbump Packaging
Technology 277 References 278 Problems 278 APPENDIX A LAPLACE PRESSURE IN
NONSPHERICAL NANOPARTICLE 280 APPENDIX B INTERDIFFUSION COEFFICIENT ? D =
CBMG'' 282 APPENDIX C NONEQUILIBRIUM VACANCIES AND CROSS-EFFECTS ON
INTERDIFFUSION IN A PSEUDO-TERNARY ALLOY 285 APPENDIX D INTERACTION BETWEEN
KIRKENDALL EFFECT AND GIBBS-THOMSON EFFECT IN THE FORMATION OF A SPHERICAL
COMPOUND NANOSHELL 289 INDEX 293
Introduction 1 1.2 Nanosphere: Surface Energy is Equivalent to
Gibbs-Thomson Potential 3 1.3 Nanosphere: Lower Melting Point 6 1.4
Nanosphere: Fewer Homogeneous Nucleation and its Effect on Phase Diagram 10
1.5 Nanosphere: Kirkendall Effect and Instability of Hollow Nanospheres 13
1.6 Nanosphere: Inverse Kirkendall Effect in Hollow Nano Alloy Spheres 17
1.7 Nanosphere: Combining Kirkendall Effect and Inverse Kirkendall Effect
on Concentric Bilayer Hollow Nanosphere 18 1.8 Nano Hole: Instability of a
Donut-Type Nano Hole in a Membrane 19 1.9 Nanowire: Point Contact Reactions
Between Metal and Silicon Nanowires 21 1.10 Nanowire: Nanogap in Silicon
Nanowires 22 1.11 Nanowire: Lithiation in Silicon Nanowires 26 1.12
Nanowire: Point Contact Reactions Between Metallic Nanowires 27 1.13 Nano
Thin Film: Explosive Reaction in Periodic Multilayered Nano Thin Films 28
1.14 Nano Microstructure in Bulk Samples: Nanotwins 30 1.15 Nano
Microstructure on the Surface of a Bulk Sample: Surface Mechanical
Attrition Treatment (SMAT) of Steel 32 References 33 Problems 35 CHAPTER 2
LINEAR AND NONLINEAR DIFFUSION 37 2.1 Introduction 37 2.2 Linear Diffusion
38 2.2.1 Atomic Flux 39 2.2.2 Fick's First Law of Diffusion 40 2.2.3
Chemical Potential 43 2.2.4 Fick's Second Law of Diffusion 45 2.2.5 Flux
Divergence 47 2.2.6 Tracer Diffusion 49 2.2.7 Diffusivity 51 2.2.8
Experimental Measurement of the Parameters in Diffusivity 53 2.3 Nonlinear
Diffusion 57 2.3.1 Nonlinear Effect due to Kinetic Consideration 58 2.3.2
Nonlinear Effect due to Thermodynamic Consideration 59 2.3.3 Combining
Thermodynamic and Kinetic Nonlinear Effects 62 References 63 Problems 64
CHAPTER 3 KIRKENDALL EFFECT AND INVERSE KIRKENDALL EFFECT 67 3.1
Introduction 67 3.2 Kirkendall Effect 69 3.2.1 Darken's Analysis of
Kirkendall Shift and Marker Motion 72 3.2.2 Boltzmann and Matano Analysis
of Interdiffusion Coefficient 76 3.2.3 Activity and Intrinsic Diffusivity
80 3.2.4 Kirkendall (Frenkel) Voiding Without Lattice Shift 84 3.3 Inverse
Kirkendall Effect 84 3.3.1 Physical Meaning of Inverse Kirkendall Effect 86
3.3.2 Inverse Kirkendall Effect on the Instability of an Alloy Nanoshell 88
3.3.3 Inverse Kirkendall Effect on Segregation in a Regular Solution
Nanoshell 90 3.4 Interaction Between Kirkendall Effect and Gibbs-Thomson
Effect in the Formation of a Spherical Compound Nanoshell 93 References 97
Problems 97 CHAPTER 4 RIPENING AMONG NANOPRECIPITATES 99 4.1 Introduction
99 4.2 Ham's Model of Growth of a Spherical Precipitate (Cr is Constant)
101 4.3 Mean-Field Consideration 103 4.4 Gibbs-Thomson Potential 105 4.5
Growth and Dissolution of a Spherical Nanoprecipitate in a Mean Field 106
4.6 LSW Theory of Kinetics of Particle Ripening 108 4.7 Continuity Equation
in Size Space 113 4.8 Size Distribution Function in Conservative Ripening
114 4.9 Further Developments of LSW Theory 115 References 115 Problems 116
CHAPTER 5 SPINODAL DECOMPOSITION 118 5.1 Introduction 118 5.2 Implication
of Diffusion Equation in Homogenization and Decomposition 121 5.3 Spinodal
Decomposition 123 5.3.1 Concentration Gradient in an Inhomogeneous Solid
Solution 123 5.3.2 Energy of Mixing to Form a Homogeneous Solid Solution
124 5.3.3 Energy of Mixing to Form an Inhomogeneous Solid Solution 126
5.3.4 Chemical Potential in Inhomogeneous Solution 129 5.3.5 Coherent
Strain Energy 131 5.3.6 Solution of the Diffusion Equation 134 References
136 Problems 136 CHAPTER 6 NUCLEATION EVENTS IN BULK MATERIALS, THIN FILMS,
AND NANOWIRES 138 6.1 Introduction 138 6.2 Thermodynamics and Kinetics of
Nucleation 140 6.2.1 Thermodynamics of Nucleation 140 6.2.2 Kinetics of
Nucleation 143 6.3 Heterogeneous Nucleation in Grain Boundaries of Bulk
Materials 148 6.3.1 Morphology of Grain Boundary Precipitates 150 6.3.2
Introducing an Epitaxial Interface to Heterogeneous Nucleation 151 6.3.3
Replacive Mechanism of a Grain Boundary 154 6.4 No Homogeneous Nucleation
in Epitaxial Growth of Si Thin Film on Si Wafer 156 6.5 Repeating
Homogeneous Nucleation of Silicide in Nanowires of Si 160 6.5.1 Point
Contact Reactions in Nanowires 161 6.5.2 Homogeneous Nucleation of
Epitaxial Silicide in Nanowires of Si 164 References 168 Problems 168
CHAPTER 7 CONTACT REACTIONS ON Si; PLANE, LINE, AND POINT CONTACT REACTIONS
170 7.1 Introduction 170 7.2 Bulk Cases 175 7.2.1 Kidson's Analysis of
Diffusion-Controlled Planar Growth 175 7.2.2 Steady State Approximation in
Layered Growth of Multiple Phases 178 7.2.3 Marker Analysis 179 7.2.4
Interdiffusion Coefficient in Intermetallic Compound 182 7.2.5 Wagner
Diffusivity 186 7.3 Thin Film Cases 187 7.3.1 Diffusion-Controlled and
Interfacial-Reaction-Controlled Growth 187 7.3.2 Kinetics of
Interfacial-Reaction-Controlled Growth 188 7.3.3 Kinetics of Competitive
Growth of Two-Layered Phases 193 7.3.4 First Phase in Silicide Formation
194 7.4 Nanowire Cases 196 7.4.1 Point Contact Reactions 197 7.4.2 Line
Contact Reactions 202 7.4.3 Planar Contact Reactions 208 References 208
Problems 209 CHAPTER 8 GRAIN GROWTH IN MICRO AND NANOSCALE 211 8.1
Introduction 211 8.2 How to Generate a Polycrystalline Microstructure 213
8.3 Computer Simulation of Grain Growth 216 8.3.1 Atomistic Simulation
Based on Monte Carlo Method 216 8.3.2 Phenomenological Simulations 217 8.4
Statistical Distribution Functions of Grain Size 219 8.5 Deterministic
(Dynamic) Approach to Grain Growth 221 8.6 Coupling Between Grain Growth of
a Central Grain and the Rest of Grains 225 8.7 Decoupling the Grain Growth
of a Central Grain from the Rest of Grains in the Normalized Size Space 226
8.8 Grain Growth in 2D Case in the Normalized Size Space 229 8.9 Grain
Rotation 231 8.9.1 Grain Rotation in Anisotropic Thin Films Under
Electromigration 232 References 237 Problems 238 CHAPTER 9 SELF-SUSTAINED
REACTIONS IN NANOSCALE MULTILAYERED THIN FILMS 240 9.1 Introduction 240 9.2
The Selection of a Pair of Metallic Thin Films for SHS 243 9.3 A Simple
Model of Single-Phase Growth in Self-Sustained Reaction 245 9.4 A Simple
Estimate of Flame Velocity in Steady State Heat Transfer 250 9.5 Comparison
in Phase Formation by Annealing and by Explosive Reaction in Al/Ni 251 9.6
Self-Explosive Silicidation Reactions 251 References 255 Problems 256
CHAPTER 10 FORMATION AND TRANSFORMATIONS OF NANOTWINS IN COPPER 258 10.1
Introduction 258 10.2 Formation of Nanotwins in Cu 260 10.2.1 First
Principle Calculation of Energy of Formation of Nanotwins 260 10.2.2 In
Situ Measurement of Stress Evolution for Nanotwin Formation During Pulse
Electrodeposition of Cu 264 10.2.3 Formation of Nanotwin Cu in
Through-Silicon Vias 266 10.3 Formation and Transformation of Oriented
Nanotwins in Cu 269 10.3.1 Formation of Oriented Nanotwins in Cu 270 10.3.2
Unidirectional Growth of Cu-Sn Intermetallic Compound on Oriented and
Nanotwinned Cu 270 10.3.3 Transformation of (111) Oriented and Nanotwinned
Cu to (100) Oriented Single Crystal of Cu 274 10.4 Potential Applications
of Nanotwinned Cu 276 10.4.1 To Reduce Electromigration in Interconnect
Technology 276 10.4.2 To Eliminate Kirkendall Voids in Microbump Packaging
Technology 277 References 278 Problems 278 APPENDIX A LAPLACE PRESSURE IN
NONSPHERICAL NANOPARTICLE 280 APPENDIX B INTERDIFFUSION COEFFICIENT ? D =
CBMG'' 282 APPENDIX C NONEQUILIBRIUM VACANCIES AND CROSS-EFFECTS ON
INTERDIFFUSION IN A PSEUDO-TERNARY ALLOY 285 APPENDIX D INTERACTION BETWEEN
KIRKENDALL EFFECT AND GIBBS-THOMSON EFFECT IN THE FORMATION OF A SPHERICAL
COMPOUND NANOSHELL 289 INDEX 293