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This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing,…mehr
This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.
Muammer Koç, PhD, is the Director of National Science Foundation (NSF)-Industry/University Cooperative Research Center (I/UCRC) on Precision Forming (CPF), Associate Professor in the Department of Mechanical Engineering at Virginia Commonwealth University; and Associate Professor of Department of Industrial Engineering at Istanbul Sehir University. His research interests include manufacturing processes and systems, micro-manufacturing, design of nano/micro-scale functional surface structures, and product innovation. Tugrul Özel, PhD, is the Director of Manufacturing Automation Research Laboratory and Associate Professor in the Department of Industrial and Systems Engineering at Rutgers University in New Jersey. His research interests include manufacturing processes and automated systems, computational modeling of machining processes, laser-based micro/nano processing, and design and manufacturing of micro-products.
Inhaltsangabe
Foreword vii Contributors ix 1 Fundamentals of Micro-Manufacturing 1 2 Micro-Fabrication Processes in Semiconductor Industry 25 3 Modeling and Analysis at Micro-Scales 43 4 Metrology, Inspection, and Process Control in Micro-Scales 71 5 Micro-Layered Manufacturing 97 6 Micro-Laser Processing 159 7 Polymer Micro-Molding/Forming Processes 197 8 Mechanical Micro-Machining 235 9 Micro-Forming 275 10 Micro-Electro Discharge Machining (muEDM) 301 11 Metal Injection Molding at Micro-Scales (muMIM) 347 Index 371
FOREWORD. CONTRIBUTORS. 1 FUNDAMENTALS OF MICRO MANUFACTURING. 2 MICRO FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY. 3 MODELING AND ANALYSIS AT MICRO SCALES. 4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO SCALES. 5 MICRO LAYERED MANUFACTURING. 6 MICRO LASER PROCESSING. 7 POLYMER MICRO MOLDING/FORMING PROCESSES. 8 MECHANICAL MICRO MACHINING. 9 MICRO FORMING. 10 MICRO ELECTRO DISCHARGE MACHINING (1/4EDM). 11 METAL INJECTION MOLDING AT MICRO SCALES (1/4MIM). INDEX.
Foreword vii Contributors ix 1 Fundamentals of Micro-Manufacturing 1 2 Micro-Fabrication Processes in Semiconductor Industry 25 3 Modeling and Analysis at Micro-Scales 43 4 Metrology, Inspection, and Process Control in Micro-Scales 71 5 Micro-Layered Manufacturing 97 6 Micro-Laser Processing 159 7 Polymer Micro-Molding/Forming Processes 197 8 Mechanical Micro-Machining 235 9 Micro-Forming 275 10 Micro-Electro Discharge Machining (muEDM) 301 11 Metal Injection Molding at Micro-Scales (muMIM) 347 Index 371
FOREWORD. CONTRIBUTORS. 1 FUNDAMENTALS OF MICRO MANUFACTURING. 2 MICRO FABRICATION PROCESSES IN SEMICONDUCTOR INDUSTRY. 3 MODELING AND ANALYSIS AT MICRO SCALES. 4 METROLOGY, INSPECTION, AND PROCESS CONTROL IN MICRO SCALES. 5 MICRO LAYERED MANUFACTURING. 6 MICRO LASER PROCESSING. 7 POLYMER MICRO MOLDING/FORMING PROCESSES. 8 MECHANICAL MICRO MACHINING. 9 MICRO FORMING. 10 MICRO ELECTRO DISCHARGE MACHINING (1/4EDM). 11 METAL INJECTION MOLDING AT MICRO SCALES (1/4MIM). INDEX.
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