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    Broschiertes Buch

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.…mehr

Produktbeschreibung
This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
  • Produktdetails
  • CISM International Centre for Mechanical Sciences 478
  • Verlag: Springer, Wien; Springer, Berlin
  • Artikelnr. des Verlages: 11817536
  • 2006. 2006
  • Seitenzahl: 211
  • Erscheinungstermin: 1. September 2006
  • Englisch
  • Abmessung: 240mm x 170mm x 12mm
  • Gewicht: 383g
  • ISBN-13: 9783211374535
  • ISBN-10: 3211374531
  • Artikelnr.: 21806626
Autorenporträt
Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.
Inhaltsangabe
Preface.- Enikov, E. T., Introduction to Micro-Systems and to the Techniques for Their Fabrication.- De Bona, F., Microstructures Under Electrostatic Loads: Discrete System Modelling.- Brusa, E., Dynamics of Mechatronic Systems at Microscale.- De Bona, F., Munteanu, M. Gh., Continuum Microstructures Loaded Electrostatically.- Lazarov, K. V., Enikov, E. T., Design of Electro-Thermal micro-Positioners: Mechanics and Electronic Position Detection.- De Bona, F., Zelenika, S., Design of Compliant Micromechanisms.- Enikov, E. T., Micro- and Nano-assemby and Manipulation Techniques for MEMS.- Lee, L. M., Cheung, L. S. L., Zohar, Y., Microfluidics: Device Science and Technology.