C. T. Pan, Y. M. Hwang, Liwei Lin, Ying-Chung Chen
Design and Fabrication of Self-Powered Micro-Harvesters (eBook, PDF)
Rotating and Vibrated Micro-Power Systems
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C. T. Pan, Y. M. Hwang, Liwei Lin, Ying-Chung Chen
Design and Fabrication of Self-Powered Micro-Harvesters (eBook, PDF)
Rotating and Vibrated Micro-Power Systems
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Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systems Design and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design, analysis and fabrication of micro power systems. Presented in four distinct parts, the authors explore the design and fabrication of: vibration-induced electromagnetic micro-generators; rotary electromagnetic micro-generators; flexible piezo-micro-generator with various widths; and PVDF electrospunpiezo-energy with…mehr
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Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systems Design and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design, analysis and fabrication of micro power systems. Presented in four distinct parts, the authors explore the design and fabrication of: vibration-induced electromagnetic micro-generators; rotary electromagnetic micro-generators; flexible piezo-micro-generator with various widths; and PVDF electrospunpiezo-energy with interdigital electrode. Focusing on the latest developments of self-powered microgenerators such as micro rotary with LTCC and filament winding method, flexible substrate, and piezo fiber-typed microgenerator with sound organization, the fabrication processes involved in MEMS and nanotechnology are introduced chapter by chapter. In addition, analytical solutions are developed for each generator to help the reader to understand the fundamentals of physical phenomena. Fully illustrated throughout and of a high technical specification, it is written in an accessible style to provide an essential reference for industry and academic researchers. * Comprehensive treatment of the newer harvesting devices including vibration-induced and rotary electromagnetic microgenerators, polyvinylidene fluoride (PVDF) nanoscale/microscale fiber, and piezo-micro-generators * Presents innovative technologies including LTCC (low temperature co-fire ceramic) processes, and PCB (printed circuit board) processes * Offers interdisciplinary interest in MEMS/NEMS technologies, green energy applications, bio-related sensors, actuators and generators * Presented in a readable style describing the fundamentals, applications and explanations of micro-harvesters, with full illustration
Produktdetails
- Produktdetails
- Verlag: John Wiley & Sons
- Seitenzahl: 288
- Erscheinungstermin: 9. April 2014
- Englisch
- ISBN-13: 9781118487815
- Artikelnr.: 40774307
- Verlag: John Wiley & Sons
- Seitenzahl: 288
- Erscheinungstermin: 9. April 2014
- Englisch
- ISBN-13: 9781118487815
- Artikelnr.: 40774307
C. T. Pan National Sun Yat-Sen University, Taiwan Y. M. Hwang National Sun Yat-Sen University, Taiwan Liwei Lin University of California, Berkeley, USA Ying-Chung Chen National Sun Yat-Sen University, Taiwan
About the Authors xi Preface xiii Acknowledgments xv 1 Introduction 1 1.1
Background 1 1.2 Energy Harvesters 2 1.2.1 Piezoelectric ZnO Energy
Harvester 3 1.2.2 Vibrational Electromagnetic Generators 3 1.2.3 Rotary
Electromagnetic Generators 4 1.2.4 NFES Piezoelectric PVDF Energy Harvester
4 1.3 Overview 5 2 Design and Fabrication of Flexible Piezoelectric
Generators Based on ZnO Thin Films 7 2.1 Introduction 7 2.2
Characterization and Theoretical Analysis of Flexible ZnO-Based
Piezoelectric Harvesters 10 2.2.1 Vibration Energy Conversion Model of
Film-Based Flexible Piezoelectric Energy Harvester 10 2.2.2
Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12 2.2.3
Optimal Thickness of PET Substrate 15 2.2.4 Model Solution of Cantilever
Plate Equation 15 2.2.5 Vibration-Induced Electric Potential and Electric
Power 18 2.2.6 Static Analysis to Calculate the Optimal Thickness of the
PET Substrate 19 2.2.7 Model Analysis and Harmonic Analysis 21 2.2.8
Results of Model Analysis and Harmonic Analysis 23 2.3 The Fabrication of
Flexible Piezoelectric ZnO Harvesters on PET Substrates 27 2.3.1 Bonding
Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27
2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to
Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29 2.3.3
Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29 2.3.4
Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering
31 2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant
Conditions 34 2.3.6 Application of ZnO/PET-Based Generator to Flash Signal
LED Module 39 2.3.7 Design and Performance of a Broad Bandwidth Energy
Harvesting System 40 2.4 Fabrication and Performance of Flexible
ZnO/SUS304-Based Piezoelectric Generators 48 2.4.1 Deposition of
Piezoelectric ZnO Thin Films on Stainless Steel Substrates 48 2.4.2
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 50 2.4.3
Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 51 2.4.4
Characterization of ZnO/SUS304-Based Flexible Piezoelectric Generators 52
2.4.5 Structural and Morphological Properties of Piezoelectric ZnO Thin
Films on Stainless Steel Substrates 54 2.4.6 Analysis of Adhesion of ZnO
Thin Films on Stainless Steel Substrates 56 2.4.7 Electrical Properties of
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 59 2.4.8
Characterization of Double-Sided ZnO/SUS304-Based Flexible Piezoelectric
Generator: Analysis and Modification of Back Surface of SUS304 61 2.4.9
Electrical Properties of Double-Sided ZnO/SUS304-Based Piezoelectric
Generator 63 2.5 Summary 66 References 67 3 Design and Fabrication of
Vibration-Induced Electromagnetic Microgenerators 71 3.1 Introduction 71
3.2 Comparisons between MCTG and SMTG 74 3.2.1 Magnetic Core-Type Generator
(MCTG) 74 3.2.2 Sided Magnet-Type Generator (SMTG) 76 3.3 Analysis of
Electromagnetic Vibration-Induced Microgenerators 76 3.3.1 Design of
Electromagnetic Vibration-Induced Microgenerators 77 3.3.2 Analysis Mode of
the Microvibration Structure 78 3.3.3 Analysis Mode of Magnetic Field 81
3.3.4 Evaluation of Various Parameters of Power Output 84 3.4 Analytical
Results and Discussion 88 3.4.1 Analysis of Bending Stress within the
Supporting Beam of the Spiral Microspring 90 3.4.2 Finite Element Models
for Magnetic Density Distribution 93 3.4.3 Power Output Evaluation 97 3.5
Fabrication of Microcoil for Microgenerator 103 3.5.1 Microspring and
Induction Coil 103 3.5.2 Microspring and Magnet 105 3.6 Tests and
Experiments 106 3.6.1 Measurement System 106 3.6.2 Measurement Results and
Discussion 107 3.6.3 Comparison between Measured Results and Analytical
Values 110 3.7 Conclusions 112 3.7.1 Analysis of Microgenerators and
Vibration Mode and Simulation of the Magnetic Field 112 3.7.2 Fabrication
of LTCC Microsensor 112 3.7.3 Measurement and Analysis Results 113 3.8
Summary 113 References 114 4 Design and Fabrication of Rotary
Electromagnetic Microgenerator 117 4.1 Introduction 117 4.1.1
Piezoelectric, Thermoelectric, and Electrostatic Generators 119 4.1.2
Vibrational Electromagnetic Generators 119 4.1.3 Rotary Electromagnetic
Generators 120 4.1.4 Generator Processes 121 4.1.5 Lithographie
Galvanoformung Abformung Process 122 4.1.6 Winding Processes 123 4.1.7 LTCC
123 4.1.8 Printed Circuit Board Processes 124 4.1.9 Finite-Element
Simulation and Analytical Solutions 126 4.2 Case 1: Winding Generator 126
4.2.1 Design 127 4.2.2 Analytical Formulation 132 4.2.3 Simulation 134
4.2.4 Fabrication Process 138 4.2.5 Results and Discussion (1) 139 4.2.6
Results and Discussion (2) 142 4.3 Case 2: LTCC Generator 146 4.3.1
Simulation 147 4.3.2 Analytical Theorem of Microgenerator Electromagnetism
148 4.3.3 Simplification 152 4.3.4 Analysis of Vector Magnetic Potential
153 4.3.5 Analytical Solutions for Power Generation 154 4.4 Fabrication 157
4.4.1 LTCC Process 157 4.4.2 Magnet Process 159 4.4.3 Measurement Set-up
160 4.5 Results and Discussion 162 4.5.1 Design 162 4.5.2 Analytical
Solutions 168 4.5.3 Fabrication 170 References 178 5 Design and Fabrication
of Electrospun PVDF Piezo-Energy Harvesters 183 5.1 Introduction 183 5.2
Fundamentals of Electrospinning Technology 187 5.2.1 Introduction to
Electrospinning 187 5.2.2 Alignment and Assembly of Nanofibers 190 5.3
Near-Field Electrospinning 191 5.3.1 Introduction and Background 191 5.3.2
Principles of Operation 194 5.3.3 Process and Experiment 196 5.3.4 Summary
202 5.4 Continuous NFES 202 5.4.1 Introduction and Background 202 5.4.2
Principles of Operation 202 5.4.3 Controllability and Continuity 205 5.4.4
Process Characterization 208 5.4.5 Summary 211 5.5 Direct-Write
Piezoelectric Nanogenerator 211 5.5.1 Introduction and Background 211 5.5.2
Polyvinylidene Fluoride 212 5.5.3 Theoretical Studies for Realization of
Electrospun PVDF Nanofibers 213 5.5.4 Electrospinning of PVDF Nanofibers
216 5.5.5 Detailed Discussion of Process Parameters 219 5.5.6 Experimental
Realization of PVDF Nanogenerator 223 5.5.7 Summary 241 5.6 Materials,
Structure, and Operation of Nanogenerator with Future Prospects 241 5.6.1
Material and Structural Characteristics 241 5.6.2 Operation of
Nanogenerator 243 5.6.3 Summary and Future Prospects 248 5.7 Case Study:
Large-Array Electrospun PVDF Nanogenerators on a Flexible Substrate 248
5.7.1 Introduction and Background 248 5.7.2 Working Principle 249 5.7.3
Device Fabrication 249 5.7.4 Experimental Results 251 5.7.5 Summary 252 5.8
Conclusion 253 5.8.1 Near-Field Electrospinning 253 5.8.2 Continuous
Near-Field Electrospinning 254 5.8.3 Direct-Write Piezoelectric PVDF 254
5.9 Future Directions 255 5.9.1 NFES Integrated Nanofiber Sensors 255 5.9.2
NFES One-Dimensional Sub-Wavelength Waveguide 256 5.9.3 NFES Biological
Applications 257 5.9.4 Direct-Write Piezoelectric PVDF Nanogenerators 258
References 258 Index 265
Background 1 1.2 Energy Harvesters 2 1.2.1 Piezoelectric ZnO Energy
Harvester 3 1.2.2 Vibrational Electromagnetic Generators 3 1.2.3 Rotary
Electromagnetic Generators 4 1.2.4 NFES Piezoelectric PVDF Energy Harvester
4 1.3 Overview 5 2 Design and Fabrication of Flexible Piezoelectric
Generators Based on ZnO Thin Films 7 2.1 Introduction 7 2.2
Characterization and Theoretical Analysis of Flexible ZnO-Based
Piezoelectric Harvesters 10 2.2.1 Vibration Energy Conversion Model of
Film-Based Flexible Piezoelectric Energy Harvester 10 2.2.2
Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12 2.2.3
Optimal Thickness of PET Substrate 15 2.2.4 Model Solution of Cantilever
Plate Equation 15 2.2.5 Vibration-Induced Electric Potential and Electric
Power 18 2.2.6 Static Analysis to Calculate the Optimal Thickness of the
PET Substrate 19 2.2.7 Model Analysis and Harmonic Analysis 21 2.2.8
Results of Model Analysis and Harmonic Analysis 23 2.3 The Fabrication of
Flexible Piezoelectric ZnO Harvesters on PET Substrates 27 2.3.1 Bonding
Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27
2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to
Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29 2.3.3
Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29 2.3.4
Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering
31 2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant
Conditions 34 2.3.6 Application of ZnO/PET-Based Generator to Flash Signal
LED Module 39 2.3.7 Design and Performance of a Broad Bandwidth Energy
Harvesting System 40 2.4 Fabrication and Performance of Flexible
ZnO/SUS304-Based Piezoelectric Generators 48 2.4.1 Deposition of
Piezoelectric ZnO Thin Films on Stainless Steel Substrates 48 2.4.2
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 50 2.4.3
Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 51 2.4.4
Characterization of ZnO/SUS304-Based Flexible Piezoelectric Generators 52
2.4.5 Structural and Morphological Properties of Piezoelectric ZnO Thin
Films on Stainless Steel Substrates 54 2.4.6 Analysis of Adhesion of ZnO
Thin Films on Stainless Steel Substrates 56 2.4.7 Electrical Properties of
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 59 2.4.8
Characterization of Double-Sided ZnO/SUS304-Based Flexible Piezoelectric
Generator: Analysis and Modification of Back Surface of SUS304 61 2.4.9
Electrical Properties of Double-Sided ZnO/SUS304-Based Piezoelectric
Generator 63 2.5 Summary 66 References 67 3 Design and Fabrication of
Vibration-Induced Electromagnetic Microgenerators 71 3.1 Introduction 71
3.2 Comparisons between MCTG and SMTG 74 3.2.1 Magnetic Core-Type Generator
(MCTG) 74 3.2.2 Sided Magnet-Type Generator (SMTG) 76 3.3 Analysis of
Electromagnetic Vibration-Induced Microgenerators 76 3.3.1 Design of
Electromagnetic Vibration-Induced Microgenerators 77 3.3.2 Analysis Mode of
the Microvibration Structure 78 3.3.3 Analysis Mode of Magnetic Field 81
3.3.4 Evaluation of Various Parameters of Power Output 84 3.4 Analytical
Results and Discussion 88 3.4.1 Analysis of Bending Stress within the
Supporting Beam of the Spiral Microspring 90 3.4.2 Finite Element Models
for Magnetic Density Distribution 93 3.4.3 Power Output Evaluation 97 3.5
Fabrication of Microcoil for Microgenerator 103 3.5.1 Microspring and
Induction Coil 103 3.5.2 Microspring and Magnet 105 3.6 Tests and
Experiments 106 3.6.1 Measurement System 106 3.6.2 Measurement Results and
Discussion 107 3.6.3 Comparison between Measured Results and Analytical
Values 110 3.7 Conclusions 112 3.7.1 Analysis of Microgenerators and
Vibration Mode and Simulation of the Magnetic Field 112 3.7.2 Fabrication
of LTCC Microsensor 112 3.7.3 Measurement and Analysis Results 113 3.8
Summary 113 References 114 4 Design and Fabrication of Rotary
Electromagnetic Microgenerator 117 4.1 Introduction 117 4.1.1
Piezoelectric, Thermoelectric, and Electrostatic Generators 119 4.1.2
Vibrational Electromagnetic Generators 119 4.1.3 Rotary Electromagnetic
Generators 120 4.1.4 Generator Processes 121 4.1.5 Lithographie
Galvanoformung Abformung Process 122 4.1.6 Winding Processes 123 4.1.7 LTCC
123 4.1.8 Printed Circuit Board Processes 124 4.1.9 Finite-Element
Simulation and Analytical Solutions 126 4.2 Case 1: Winding Generator 126
4.2.1 Design 127 4.2.2 Analytical Formulation 132 4.2.3 Simulation 134
4.2.4 Fabrication Process 138 4.2.5 Results and Discussion (1) 139 4.2.6
Results and Discussion (2) 142 4.3 Case 2: LTCC Generator 146 4.3.1
Simulation 147 4.3.2 Analytical Theorem of Microgenerator Electromagnetism
148 4.3.3 Simplification 152 4.3.4 Analysis of Vector Magnetic Potential
153 4.3.5 Analytical Solutions for Power Generation 154 4.4 Fabrication 157
4.4.1 LTCC Process 157 4.4.2 Magnet Process 159 4.4.3 Measurement Set-up
160 4.5 Results and Discussion 162 4.5.1 Design 162 4.5.2 Analytical
Solutions 168 4.5.3 Fabrication 170 References 178 5 Design and Fabrication
of Electrospun PVDF Piezo-Energy Harvesters 183 5.1 Introduction 183 5.2
Fundamentals of Electrospinning Technology 187 5.2.1 Introduction to
Electrospinning 187 5.2.2 Alignment and Assembly of Nanofibers 190 5.3
Near-Field Electrospinning 191 5.3.1 Introduction and Background 191 5.3.2
Principles of Operation 194 5.3.3 Process and Experiment 196 5.3.4 Summary
202 5.4 Continuous NFES 202 5.4.1 Introduction and Background 202 5.4.2
Principles of Operation 202 5.4.3 Controllability and Continuity 205 5.4.4
Process Characterization 208 5.4.5 Summary 211 5.5 Direct-Write
Piezoelectric Nanogenerator 211 5.5.1 Introduction and Background 211 5.5.2
Polyvinylidene Fluoride 212 5.5.3 Theoretical Studies for Realization of
Electrospun PVDF Nanofibers 213 5.5.4 Electrospinning of PVDF Nanofibers
216 5.5.5 Detailed Discussion of Process Parameters 219 5.5.6 Experimental
Realization of PVDF Nanogenerator 223 5.5.7 Summary 241 5.6 Materials,
Structure, and Operation of Nanogenerator with Future Prospects 241 5.6.1
Material and Structural Characteristics 241 5.6.2 Operation of
Nanogenerator 243 5.6.3 Summary and Future Prospects 248 5.7 Case Study:
Large-Array Electrospun PVDF Nanogenerators on a Flexible Substrate 248
5.7.1 Introduction and Background 248 5.7.2 Working Principle 249 5.7.3
Device Fabrication 249 5.7.4 Experimental Results 251 5.7.5 Summary 252 5.8
Conclusion 253 5.8.1 Near-Field Electrospinning 253 5.8.2 Continuous
Near-Field Electrospinning 254 5.8.3 Direct-Write Piezoelectric PVDF 254
5.9 Future Directions 255 5.9.1 NFES Integrated Nanofiber Sensors 255 5.9.2
NFES One-Dimensional Sub-Wavelength Waveguide 256 5.9.3 NFES Biological
Applications 257 5.9.4 Direct-Write Piezoelectric PVDF Nanogenerators 258
References 258 Index 265
About the Authors xi Preface xiii Acknowledgments xv 1 Introduction 1 1.1
Background 1 1.2 Energy Harvesters 2 1.2.1 Piezoelectric ZnO Energy
Harvester 3 1.2.2 Vibrational Electromagnetic Generators 3 1.2.3 Rotary
Electromagnetic Generators 4 1.2.4 NFES Piezoelectric PVDF Energy Harvester
4 1.3 Overview 5 2 Design and Fabrication of Flexible Piezoelectric
Generators Based on ZnO Thin Films 7 2.1 Introduction 7 2.2
Characterization and Theoretical Analysis of Flexible ZnO-Based
Piezoelectric Harvesters 10 2.2.1 Vibration Energy Conversion Model of
Film-Based Flexible Piezoelectric Energy Harvester 10 2.2.2
Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12 2.2.3
Optimal Thickness of PET Substrate 15 2.2.4 Model Solution of Cantilever
Plate Equation 15 2.2.5 Vibration-Induced Electric Potential and Electric
Power 18 2.2.6 Static Analysis to Calculate the Optimal Thickness of the
PET Substrate 19 2.2.7 Model Analysis and Harmonic Analysis 21 2.2.8
Results of Model Analysis and Harmonic Analysis 23 2.3 The Fabrication of
Flexible Piezoelectric ZnO Harvesters on PET Substrates 27 2.3.1 Bonding
Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27
2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to
Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29 2.3.3
Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29 2.3.4
Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering
31 2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant
Conditions 34 2.3.6 Application of ZnO/PET-Based Generator to Flash Signal
LED Module 39 2.3.7 Design and Performance of a Broad Bandwidth Energy
Harvesting System 40 2.4 Fabrication and Performance of Flexible
ZnO/SUS304-Based Piezoelectric Generators 48 2.4.1 Deposition of
Piezoelectric ZnO Thin Films on Stainless Steel Substrates 48 2.4.2
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 50 2.4.3
Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 51 2.4.4
Characterization of ZnO/SUS304-Based Flexible Piezoelectric Generators 52
2.4.5 Structural and Morphological Properties of Piezoelectric ZnO Thin
Films on Stainless Steel Substrates 54 2.4.6 Analysis of Adhesion of ZnO
Thin Films on Stainless Steel Substrates 56 2.4.7 Electrical Properties of
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 59 2.4.8
Characterization of Double-Sided ZnO/SUS304-Based Flexible Piezoelectric
Generator: Analysis and Modification of Back Surface of SUS304 61 2.4.9
Electrical Properties of Double-Sided ZnO/SUS304-Based Piezoelectric
Generator 63 2.5 Summary 66 References 67 3 Design and Fabrication of
Vibration-Induced Electromagnetic Microgenerators 71 3.1 Introduction 71
3.2 Comparisons between MCTG and SMTG 74 3.2.1 Magnetic Core-Type Generator
(MCTG) 74 3.2.2 Sided Magnet-Type Generator (SMTG) 76 3.3 Analysis of
Electromagnetic Vibration-Induced Microgenerators 76 3.3.1 Design of
Electromagnetic Vibration-Induced Microgenerators 77 3.3.2 Analysis Mode of
the Microvibration Structure 78 3.3.3 Analysis Mode of Magnetic Field 81
3.3.4 Evaluation of Various Parameters of Power Output 84 3.4 Analytical
Results and Discussion 88 3.4.1 Analysis of Bending Stress within the
Supporting Beam of the Spiral Microspring 90 3.4.2 Finite Element Models
for Magnetic Density Distribution 93 3.4.3 Power Output Evaluation 97 3.5
Fabrication of Microcoil for Microgenerator 103 3.5.1 Microspring and
Induction Coil 103 3.5.2 Microspring and Magnet 105 3.6 Tests and
Experiments 106 3.6.1 Measurement System 106 3.6.2 Measurement Results and
Discussion 107 3.6.3 Comparison between Measured Results and Analytical
Values 110 3.7 Conclusions 112 3.7.1 Analysis of Microgenerators and
Vibration Mode and Simulation of the Magnetic Field 112 3.7.2 Fabrication
of LTCC Microsensor 112 3.7.3 Measurement and Analysis Results 113 3.8
Summary 113 References 114 4 Design and Fabrication of Rotary
Electromagnetic Microgenerator 117 4.1 Introduction 117 4.1.1
Piezoelectric, Thermoelectric, and Electrostatic Generators 119 4.1.2
Vibrational Electromagnetic Generators 119 4.1.3 Rotary Electromagnetic
Generators 120 4.1.4 Generator Processes 121 4.1.5 Lithographie
Galvanoformung Abformung Process 122 4.1.6 Winding Processes 123 4.1.7 LTCC
123 4.1.8 Printed Circuit Board Processes 124 4.1.9 Finite-Element
Simulation and Analytical Solutions 126 4.2 Case 1: Winding Generator 126
4.2.1 Design 127 4.2.2 Analytical Formulation 132 4.2.3 Simulation 134
4.2.4 Fabrication Process 138 4.2.5 Results and Discussion (1) 139 4.2.6
Results and Discussion (2) 142 4.3 Case 2: LTCC Generator 146 4.3.1
Simulation 147 4.3.2 Analytical Theorem of Microgenerator Electromagnetism
148 4.3.3 Simplification 152 4.3.4 Analysis of Vector Magnetic Potential
153 4.3.5 Analytical Solutions for Power Generation 154 4.4 Fabrication 157
4.4.1 LTCC Process 157 4.4.2 Magnet Process 159 4.4.3 Measurement Set-up
160 4.5 Results and Discussion 162 4.5.1 Design 162 4.5.2 Analytical
Solutions 168 4.5.3 Fabrication 170 References 178 5 Design and Fabrication
of Electrospun PVDF Piezo-Energy Harvesters 183 5.1 Introduction 183 5.2
Fundamentals of Electrospinning Technology 187 5.2.1 Introduction to
Electrospinning 187 5.2.2 Alignment and Assembly of Nanofibers 190 5.3
Near-Field Electrospinning 191 5.3.1 Introduction and Background 191 5.3.2
Principles of Operation 194 5.3.3 Process and Experiment 196 5.3.4 Summary
202 5.4 Continuous NFES 202 5.4.1 Introduction and Background 202 5.4.2
Principles of Operation 202 5.4.3 Controllability and Continuity 205 5.4.4
Process Characterization 208 5.4.5 Summary 211 5.5 Direct-Write
Piezoelectric Nanogenerator 211 5.5.1 Introduction and Background 211 5.5.2
Polyvinylidene Fluoride 212 5.5.3 Theoretical Studies for Realization of
Electrospun PVDF Nanofibers 213 5.5.4 Electrospinning of PVDF Nanofibers
216 5.5.5 Detailed Discussion of Process Parameters 219 5.5.6 Experimental
Realization of PVDF Nanogenerator 223 5.5.7 Summary 241 5.6 Materials,
Structure, and Operation of Nanogenerator with Future Prospects 241 5.6.1
Material and Structural Characteristics 241 5.6.2 Operation of
Nanogenerator 243 5.6.3 Summary and Future Prospects 248 5.7 Case Study:
Large-Array Electrospun PVDF Nanogenerators on a Flexible Substrate 248
5.7.1 Introduction and Background 248 5.7.2 Working Principle 249 5.7.3
Device Fabrication 249 5.7.4 Experimental Results 251 5.7.5 Summary 252 5.8
Conclusion 253 5.8.1 Near-Field Electrospinning 253 5.8.2 Continuous
Near-Field Electrospinning 254 5.8.3 Direct-Write Piezoelectric PVDF 254
5.9 Future Directions 255 5.9.1 NFES Integrated Nanofiber Sensors 255 5.9.2
NFES One-Dimensional Sub-Wavelength Waveguide 256 5.9.3 NFES Biological
Applications 257 5.9.4 Direct-Write Piezoelectric PVDF Nanogenerators 258
References 258 Index 265
Background 1 1.2 Energy Harvesters 2 1.2.1 Piezoelectric ZnO Energy
Harvester 3 1.2.2 Vibrational Electromagnetic Generators 3 1.2.3 Rotary
Electromagnetic Generators 4 1.2.4 NFES Piezoelectric PVDF Energy Harvester
4 1.3 Overview 5 2 Design and Fabrication of Flexible Piezoelectric
Generators Based on ZnO Thin Films 7 2.1 Introduction 7 2.2
Characterization and Theoretical Analysis of Flexible ZnO-Based
Piezoelectric Harvesters 10 2.2.1 Vibration Energy Conversion Model of
Film-Based Flexible Piezoelectric Energy Harvester 10 2.2.2
Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12 2.2.3
Optimal Thickness of PET Substrate 15 2.2.4 Model Solution of Cantilever
Plate Equation 15 2.2.5 Vibration-Induced Electric Potential and Electric
Power 18 2.2.6 Static Analysis to Calculate the Optimal Thickness of the
PET Substrate 19 2.2.7 Model Analysis and Harmonic Analysis 21 2.2.8
Results of Model Analysis and Harmonic Analysis 23 2.3 The Fabrication of
Flexible Piezoelectric ZnO Harvesters on PET Substrates 27 2.3.1 Bonding
Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27
2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to
Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29 2.3.3
Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29 2.3.4
Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering
31 2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant
Conditions 34 2.3.6 Application of ZnO/PET-Based Generator to Flash Signal
LED Module 39 2.3.7 Design and Performance of a Broad Bandwidth Energy
Harvesting System 40 2.4 Fabrication and Performance of Flexible
ZnO/SUS304-Based Piezoelectric Generators 48 2.4.1 Deposition of
Piezoelectric ZnO Thin Films on Stainless Steel Substrates 48 2.4.2
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 50 2.4.3
Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 51 2.4.4
Characterization of ZnO/SUS304-Based Flexible Piezoelectric Generators 52
2.4.5 Structural and Morphological Properties of Piezoelectric ZnO Thin
Films on Stainless Steel Substrates 54 2.4.6 Analysis of Adhesion of ZnO
Thin Films on Stainless Steel Substrates 56 2.4.7 Electrical Properties of
Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 59 2.4.8
Characterization of Double-Sided ZnO/SUS304-Based Flexible Piezoelectric
Generator: Analysis and Modification of Back Surface of SUS304 61 2.4.9
Electrical Properties of Double-Sided ZnO/SUS304-Based Piezoelectric
Generator 63 2.5 Summary 66 References 67 3 Design and Fabrication of
Vibration-Induced Electromagnetic Microgenerators 71 3.1 Introduction 71
3.2 Comparisons between MCTG and SMTG 74 3.2.1 Magnetic Core-Type Generator
(MCTG) 74 3.2.2 Sided Magnet-Type Generator (SMTG) 76 3.3 Analysis of
Electromagnetic Vibration-Induced Microgenerators 76 3.3.1 Design of
Electromagnetic Vibration-Induced Microgenerators 77 3.3.2 Analysis Mode of
the Microvibration Structure 78 3.3.3 Analysis Mode of Magnetic Field 81
3.3.4 Evaluation of Various Parameters of Power Output 84 3.4 Analytical
Results and Discussion 88 3.4.1 Analysis of Bending Stress within the
Supporting Beam of the Spiral Microspring 90 3.4.2 Finite Element Models
for Magnetic Density Distribution 93 3.4.3 Power Output Evaluation 97 3.5
Fabrication of Microcoil for Microgenerator 103 3.5.1 Microspring and
Induction Coil 103 3.5.2 Microspring and Magnet 105 3.6 Tests and
Experiments 106 3.6.1 Measurement System 106 3.6.2 Measurement Results and
Discussion 107 3.6.3 Comparison between Measured Results and Analytical
Values 110 3.7 Conclusions 112 3.7.1 Analysis of Microgenerators and
Vibration Mode and Simulation of the Magnetic Field 112 3.7.2 Fabrication
of LTCC Microsensor 112 3.7.3 Measurement and Analysis Results 113 3.8
Summary 113 References 114 4 Design and Fabrication of Rotary
Electromagnetic Microgenerator 117 4.1 Introduction 117 4.1.1
Piezoelectric, Thermoelectric, and Electrostatic Generators 119 4.1.2
Vibrational Electromagnetic Generators 119 4.1.3 Rotary Electromagnetic
Generators 120 4.1.4 Generator Processes 121 4.1.5 Lithographie
Galvanoformung Abformung Process 122 4.1.6 Winding Processes 123 4.1.7 LTCC
123 4.1.8 Printed Circuit Board Processes 124 4.1.9 Finite-Element
Simulation and Analytical Solutions 126 4.2 Case 1: Winding Generator 126
4.2.1 Design 127 4.2.2 Analytical Formulation 132 4.2.3 Simulation 134
4.2.4 Fabrication Process 138 4.2.5 Results and Discussion (1) 139 4.2.6
Results and Discussion (2) 142 4.3 Case 2: LTCC Generator 146 4.3.1
Simulation 147 4.3.2 Analytical Theorem of Microgenerator Electromagnetism
148 4.3.3 Simplification 152 4.3.4 Analysis of Vector Magnetic Potential
153 4.3.5 Analytical Solutions for Power Generation 154 4.4 Fabrication 157
4.4.1 LTCC Process 157 4.4.2 Magnet Process 159 4.4.3 Measurement Set-up
160 4.5 Results and Discussion 162 4.5.1 Design 162 4.5.2 Analytical
Solutions 168 4.5.3 Fabrication 170 References 178 5 Design and Fabrication
of Electrospun PVDF Piezo-Energy Harvesters 183 5.1 Introduction 183 5.2
Fundamentals of Electrospinning Technology 187 5.2.1 Introduction to
Electrospinning 187 5.2.2 Alignment and Assembly of Nanofibers 190 5.3
Near-Field Electrospinning 191 5.3.1 Introduction and Background 191 5.3.2
Principles of Operation 194 5.3.3 Process and Experiment 196 5.3.4 Summary
202 5.4 Continuous NFES 202 5.4.1 Introduction and Background 202 5.4.2
Principles of Operation 202 5.4.3 Controllability and Continuity 205 5.4.4
Process Characterization 208 5.4.5 Summary 211 5.5 Direct-Write
Piezoelectric Nanogenerator 211 5.5.1 Introduction and Background 211 5.5.2
Polyvinylidene Fluoride 212 5.5.3 Theoretical Studies for Realization of
Electrospun PVDF Nanofibers 213 5.5.4 Electrospinning of PVDF Nanofibers
216 5.5.5 Detailed Discussion of Process Parameters 219 5.5.6 Experimental
Realization of PVDF Nanogenerator 223 5.5.7 Summary 241 5.6 Materials,
Structure, and Operation of Nanogenerator with Future Prospects 241 5.6.1
Material and Structural Characteristics 241 5.6.2 Operation of
Nanogenerator 243 5.6.3 Summary and Future Prospects 248 5.7 Case Study:
Large-Array Electrospun PVDF Nanogenerators on a Flexible Substrate 248
5.7.1 Introduction and Background 248 5.7.2 Working Principle 249 5.7.3
Device Fabrication 249 5.7.4 Experimental Results 251 5.7.5 Summary 252 5.8
Conclusion 253 5.8.1 Near-Field Electrospinning 253 5.8.2 Continuous
Near-Field Electrospinning 254 5.8.3 Direct-Write Piezoelectric PVDF 254
5.9 Future Directions 255 5.9.1 NFES Integrated Nanofiber Sensors 255 5.9.2
NFES One-Dimensional Sub-Wavelength Waveguide 256 5.9.3 NFES Biological
Applications 257 5.9.4 Direct-Write Piezoelectric PVDF Nanogenerators 258
References 258 Index 265