Handbook of Silicon Based MEMS Materials and Technologies
Aus der Reihe
Micro & Nano Technologies
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- Einzelkauf Download ausgewählt
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Sprache:Englisch
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eBook Format:ePUB 3
- ePUB 3 255,00 € ausgewählt
- ePUB 215,00 €
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Auflage:3. Auflage
- 2. Auflage 200,00 €
- 3. Auflage 255,00 € ausgewählt
255,00 €
inkl. gesetzl. MwSt.Beschreibung
Produktdetails
Format
ePUB 3
Kopierschutz
Nein
Family Sharing
Nein
Text-to-Speech
Ja
Erscheinungsdatum
17.04.2020
Herausgeber
Markku Tilli + weitereVerlag
Elsevier Science & Techn.Seitenzahl
1026 (Printausgabe)
Auflage
3. Auflage
Sprache
Englisch
EAN
9780128177877
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.
The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.
- Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits
- Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures
- Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements
- Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students.
- Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits
- Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures
- Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements
- Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
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