Foundation of MEMS

Preface to Second Edition



Preface to First Edition



Note to Instructors



About the Author



Notational Conventions

Chapter 1: Introduction




1.0. Preview    



1.1.  The History of MEMS Development    



1.1.1. From the Beginning to 1990    



1.1.2. From 1990 to 2001    



1.1.3. 2002 to present    



1.1.4. Future Trends    



1.2. The Intrinsic Characteristics of MEMS    



1.2.1. Miniaturization    



1.2.2. Microelectronics Integration    



1.2.3. Parallel Fabrication with Precision    



1.3. Devices: Sensors and Actuators         



1.3.1. Energy Domains and Transducers         



1.3.2. Sensors Considerations         



13.3.  Sensor Noise and Design Complexity         



1.3.4. Actuators Considerations         



Summary   



Problems 



References 

Chapter 2: First-Pass Introduction to Microfabrication        
   



2.0. Preview         



2.1. Overview of Microfabrication         



2.2. Essential Overview of Frequently Used Microfabrication Processes    



2.2.1. Photolithography         



2.2.2. Thin film deposition         



2.2.3. Thermal oxidation of silicon         



2.2.4. Wet Etching         



2.2.5. Silicon anisotropic etching         



2.2.6. Plasma etching and reactive ion etching         



2.2.7. Doping         



2.2.8. Wafer dicing         



2.2.9. Wafer bonding         



2.3. The Microelectronics Fabrication Process Flow         



2.4. Silicon-based MEMS Processes         



2.5. Packaging and Integration         



2.5.1. Integration Options         



2.5.2. Encapsulation         



2.6. New Materials and Fabrication Processes         



2.7. Process Selection and Design         



2.7.1. Points of Consideration for Deposition Processes    



2.7.2. Points of Consideration for Etching Processes         



2.7.3. Ideal Rules for Building a Process Flow         



2.7.4. Rules for Building a Robust Process         



Summary         



Problems         



References         

Chapter 3: Review of Essential Electrical and Mechanical Concepts         



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3.1. Conductivity of Semiconductors         



3.1.1. Semiconductor Materials         



3.1.2. Calculation of Charge Carrier Concentr