Alexey Ivanov

Silicon Anodization as a Structuring Technique (eBook, PDF)

Literature Review, Modeling and Experiments

• Format: PDF

Produktbeschreibung

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Contents

• Silicon Anodization: State of the Art
• Experimental, Characterization and Simulation Methods
• Microscale Study of Anodization Process
• Anodization Process as a Structuring Technique: Experiments and Simulation

Target Groups

• Researchers and students of microsystems technology, electrochemistry, microengineering
• Practitioners in the area of microsystems, silicon processing and electrochemical material processing

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Produktdetails

• Verlag: Gabler, Betriebswirt.-Vlg
• Seitenzahl: 316
• Erscheinungstermin: 10. September 2017
• Englisch
• ISBN-13: 9783658192389
• Artikelnr.: 52940715

Autorenporträt

Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

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Inhaltsangabe

Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.