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Ultrashort Pulse Laser Ablation of Bulk Materials Using Shaped Laser Beams (eBook, PDF)

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High precision, high quality, and high throughput of ultrashort pulse laser ablation of bulk material are the most demanded properties that are required to let this process technology compete with other micro-machining techniques. Previous attempts to increase volumetric ablation rates of ultrashort pulse laser processes were based on the increase of fluence or pulse repetition rates. They run into limitations mainly set by the occurrence of bumpy surfaces due to overheating of bulk material. In this work, the potential of laser beam shaping for the enhancement of ablation rates is studi...

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