eBook, ePUB

Smart Sensors and MEMS (eBook, ePUB)

Intelligent Sensing Devices and Microsystems for Industrial Applications

Redaktion: Nihtianov, S.; Luque, A.
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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultra...

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