Silicon-on-Insulator Technology: Materials to VLSI (eBook, PDF)
J. -P. Colinge
eBook, PDF

Silicon-on-Insulator Technology: Materials to VLSI (eBook, PDF)

Materials to VLSI

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Silicon-on-Insulator Technology: Materials to VLSI, Third Edition, retraces the evolution of SOI materials, devices and circuits over a period of roughly twenty years. Twenty years of progress, research and development during which SOI material fabrication techniques have been born and abandoned, devices have been invented and forgotten, but, most importantly, twenty years during which SOI Technology has little by little proven it could outperform bulk silicon in every possible way. The turn of the century turned out to be a milestone for the semiconductor industry, as high-quality SOI wafers ...

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