Silicon Anodization as a Structuring Technique (eBook, PDF)
Literature Review, Modeling and Experiments
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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.Contents Silicon Anodization: State of the ArtExperimental, Characterization and Simulation MethodsMicroscale Study of Anodization ...
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Contents
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Contents
- Silicon Anodization: State of the Art
- Experimental, Characterization and Simulation Methods
- Microscale Study of Anodization Process
- Anodization Process as a Structuring Technique: Experiments and Simulation
- Researchers and students of microsystems technology, electrochemistry, microengineering
- Practitioners in the area of microsystems, silicon processing and electrochemical material processing
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