Self-Powered and Soft Polymer MEMS/NEMS Devices (eBook, PDF)

Self-Powered and Soft Polymer MEMS/NEMS Devices (eBook, PDF)

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This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. Included are chapters that:Describe self/low-powered MEMS devices that are developed through biomimetic and bio-inspired approaches; Review the recent progress in kinetic MEM...

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