Reliability of MEMS (eBook, PDF)
eBook, PDF

Reliability of MEMS (eBook, PDF)

Testing of Materials and Devices

Redaktion: Tabata, Osamu; Tsuchiya, Toshiyuki
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This edition of 'Reliability of MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, one of the most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and devices. Due to their microscale size combined with novel functionalities, a whole new category of challenges arises, and proper determination of a given device's reliability is instrumental in determining its range of usability and application fields. Any kind of gadget's performance, lifetime and safety will depend on th...

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