eBook, PDF

Plasma Applications for Material Modification (eBook, PDF)

From Microelectronics to Biological Materials

Redaktion: Tabarés, Francisco L.
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This book is an up-to-date review of the most important plasma-based techniques for material modification, from microelectronics to biological materials and from fusion plasmas to atmospheric ones. Each its technical chapters is written by long-experienced, internationally recognised researchers. The book provides a deep and comprehensive insight into plasma technology and its associated elemental processes and is illustrated throughout with excellent figures and references to complement each section. Although some of the topics covered can be traced back several decades, care has been taken t...

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