Fundamental Principles of Optical Lithography (eBook, ePUB)
Chris Mack
eBook, ePUB

Fundamental Principles of Optical Lithography (eBook, ePUB)

The Science of Microfabrication

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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formatio...

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