From MEMS to Bio-MEMS and Bio-NEMS (eBook, PDF)

This book details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. This color text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download.