Electron-Beam Interactions with Solids (eBook, PDF)
Maurizio Dapor
eBook, PDF

Electron-Beam Interactions with Solids (eBook, PDF)

Application of the Monte Carlo Method to Electron Scattering Problems

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The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission a...

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