DIY MEMS (eBook, PDF)
Deborah Munro
eBook, PDF

DIY MEMS (eBook, PDF)

Fabricating Microelectromechanical Systems in Open Use Labs

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This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, c...

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