- Provides a single-source reference on contactless probing approaches for VLSI testing and diagnostic measurement
- Introduces readers to various optical contactless testing techniques, such as Electro-Optic Probing, Charge Density Probe, and Photo-emissive Probe
- Discusses the applicability and adaptability of each technique, based on multilayer metallization, wafer level techniques, and invasiveness
- Provides a comparison among various contactless testing techniques
- Describes a variety of industrial applications of contactless VLSI testing
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