Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (eBook, PDF)
eBook, PDF

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (eBook, PDF)

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A NATO Advanced Research Workshop (ARW) entitled "Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators" was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems ...

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