ZnO Based Tunable Surface Acoustic Wave Devices
Nuri EmanetogluYicheng Lu
Broschiertes Buch

ZnO Based Tunable Surface Acoustic Wave Devices

The Monolithically Integrated Tunable Surface Acoustic Wave Device

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Surface acoustic wave (SAW) devices are widely used for communications and sensor applications. Making SAW devices tunable would make them more flexible and expand their applications. In this work, a novel monolithically integrated tunable SAW (MITSAW) device is proposed, designed and analyzed. The device consists of zinc oxide (ZnO) and magnesium zinc oxide ((Mg,Zn)O) multilayer structures grown on sapphire substrates, and utilizes their piezoelectric and semiconducting properties. It is shown that (Mg,Zn)O is piezoelectric for Mg mole concentrations less than 35%, where the compound has the ...