VLS growth of semiconductor SiC nanowires for electronics applications

VLS growth of semiconductor SiC nanowires for electronics applications

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While investigations of semiconductor nanowires (NWs) has a long history, a significant progress is yet to be made in silicon carbide (SiC) NW technologies before they are ready to be utilized in electronic applications. In this work, SiC NW polytype control, NW axis orientation with respect to the growth substrate and other issues of potential technological importance are investigated. A new method for growing SiC NWs by vapor-liquid-solid mechanism, based on an in-situ vapor phase delivery of a metal catalyst to the growth surface during chemical vapor deposition was used. This approached pr...