Toward Inertial-Navigation-on-Chip
Haoran Wen
Broschiertes Buch

Toward Inertial-Navigation-on-Chip

The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

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This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly,...