
Through-Silicon Vias for 3D Integration
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Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. A comprehensive guide to TSV and other enabling technologies for 3D integration Written by an expert with more than 30 years of experience in the electronics industry, Through-Silicon Vias for 3D Integration provides cutting-edgeinformation on TSV, wafer thinning, thin-wafer handling, microbumping and assembly, and thermal management technologies. Applications to highperformance, high-density, low-power-cons...
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. A comprehensive guide to TSV and other enabling technologies for 3D integration Written by an expert with more than 30 years of experience in the electronics industry, Through-Silicon Vias for 3D Integration provides cutting-edgeinformation on TSV, wafer thinning, thin-wafer handling, microbumping and assembly, and thermal management technologies. Applications to highperformance, high-density, low-power-consumption, wide-bandwidth, and small-form-factor electronic products are discussed. This book offers a timely summary of progress in all aspects of this fascinating field for professionals active in 3D integration research and development, those who wish to master 3D integration problem-solving methods, and anyone in need of a low-power, wide-bandwidth design and high-yield manufacturing process for interconnect systems. Coverage includes: * Nanotechnology and 3D integration for the semiconductor industry * TSV etching, dielectric-, barrier-, and seed-layer deposition, Cu plating, CMP, and Cu revealing * TSVs: mechanical, thermal, and electrical behaviors * Thin-wafer strength measurement * Wafer thinning and thin-wafer handling * Microbumping, assembly, and reliability * Microbump electromigration * Transient liquid-phase bonding: C2C, C2W, and W2W * 2.5D IC integration with interposers * 3D IC integration with interposers * Thermal management of 3D IC integration * 3D IC packaging