The Practice of TOF-SIMS
Alan M. Spool
Broschiertes Buch

The Practice of TOF-SIMS

Time of Flight Secondary Ion Mass Spectrometry

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Time of flight secondary ion mass spectrometry, TOF-SIMS, is a highly surface sensitive analytical technique that provides information about composition with submicron lateral resolution. For select materials, TOF-SIMS provides unparalleled sensitivity along with excellent reproducibility, and as a mass spectrometric technique, it also provides excellent specificity. Of the analytical methods available, it is among the most surface sensitive, but the physical principles that underlie it are also the least understood. This volume describes the instrumentation, the physical principles behind the...