Surface Plasmon Resonance Based MEMS Displacement Sensors
Hasan Güner
Broschiertes Buch

Surface Plasmon Resonance Based MEMS Displacement Sensors

Design,Fabrication and Characterization

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Strong dependence of surface plasmon resonance (SPR) on coupling parameters offers new varieties of sensing mechanisms in nano and micro-scale engineering fields. In this study, design, fabrication and characterization of MEMS displacement sensors that utilize angular dependence of grating coupled SPR condition are explored. Several surface plasmon polariton (SPP) excitation mechanisms are reported in the academic literature. One of them which is quite adaptable to microelectromechanical systems is grating coupling scheme. In this scheme, thin metallized grating structures are particularly des...